Design of a Compact and Multi-Function Magnetic Field Steered Arc Source
Based on the principle of the control of magnetic field on arc spot motion, a compact and multi-function magnetic field steered arc source has been designed in this paper. The rotating magnetic field generator driven by small DC motors or AC motors has been also equipped behind the base of the target materials of magnetic field steered arc source. The magnet yoke fixed on shaft will be driven by the motors so as to promote the rotation of permanent magnets which are rationally distributed on magnet yoke. The different distribution of permanent magnets will produce the rotating magnetic field with different configuration structures and then the purpose of multi-control mode can be achieved. Meanwhile, the dynamic rotating magnetic field with different configurations have been also produced in this design through employing the simple and compact arc source as well as the permanent magnet with different distributions in order to improve the discharge form of arc spots, control the trajectory of arc spots, improve the utilization of target materials and the uniformity of etching as well as reduce or inhibit the emission of large particles. At the same time, the high-quality film can be also prepared so as to realize the arc spot control with various forms in an arc source, satisfy the different demands and expand the application of arc ion plating.