Electrical Properties of Nano-TiO2 Thin Film Prepared by Sol-Gel Precipitation Route Using Two-Point Probe Method
Titanium dioxide (TiO2) thin films were successfully prepared using the use of titanium isopropoxide as a precursor with an ethyl alcohol solution at a molar ratio 1.0:10 by sol-gel precipitation method at room temperature (~24°C). The gel solution was formed after mixed for different times. TiO2thin films were deposited on the P-type <100> silicon substrates by spin coating technique. In this paper, we report the comparison between conductivity and resistivity of TiO2thin films prepared at different heat treatment. The results show that the electrical properties of TiO2thin film were changed with the changes of heat treatment. The results exhibit that the resistance tends to decline as the annealing temperature increases. The most conductive sample is 700°C followed with 500°C, 300°C, 100°C and least conductive is as-deposited film. From the I-V curve, the graph giving a Schottky contact properties.