Properties of WS2 Films Prepared by Magnetron Sputtering from a Nanostructured Target
2013 ◽
Vol 872
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pp. 197-200
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Keyword(s):
X Ray
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Tungsten disulfide films were prepared by magnetron sputtering from a laboratory and a nanostructured targets. The nanostructured target was produced from WS2 nanolamellar particles prepared by self-propagating high-temperature synthesis in argon. The main phase in the films was 2H-WS2. According to the X-ray analysis, the films sputtered from the laboratory target and from the nanostructured one reveal different planes of film growth orientation.