High Heat Treatment Analysis on Ba 0.6Sr 0.4TiO3 Thin Films
Keyword(s):
Sol Gel
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Barium strontium titanate becomes famous among the microelectronic field due to its dielectric properties. Sol-gel method was used to prepare the Ba0.6Sr0.4TiO3and was deposited on SiO2substrate. The temperatures used in the heat treatment process were high temperature, 650°C. For high heat treatment temperature, the process was carried in 2 different times which were 15 min and 60min.The effect of the different temperature and time in the heat treatment process were analysed by using XRD. 650°C for 15 min and 60min, there are clearer peaks observed and the intensity of the 110 peak was sharper.
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