Measurement of the Straightness of a Leadscrew-Driven Precision Stage

2005 ◽  
Vol 295-296 ◽  
pp. 259-264 ◽  
Author(s):  
Yoshikazu Arai ◽  
Wei Gao ◽  
S. Kiyono ◽  
Tsunemoto Kuriyagawa
Keyword(s):  
Data Processing ◽  
Surface Profile ◽  
Probe Method ◽  
Profile Error ◽  
Precision Stage ◽  
Improved Technique ◽  
Straightness Error ◽  
Periodicity Component ◽  
Short Periodicity ◽  
Probe Spacing

This paper describes a multi-probe method for measuring the straightness error of a leadscrew-driven stage. Two displacement probes are employed to scan a flat artifact mounted on the stage. The surface profile error of the flat artifact is separated from the straightness error of the stage in a differential output of the probes. The straightness error can thus be obtained accurately from an integration operation of the differential output without the influence of the surface profile error. An improved technique of data processing is adopted for measurement of straightness error components with periodicity shorter than the probe spacing. The influence of the angular error of the stage is compensated for by using the result measured by an autocollimator. Experiments of straightness measurement of a leadscrew-driven stage with a lead of 1 mm were carried out by using two flat artifacts with different degrees of precision. The successful detection of the short-periodicity component of the straightness error with a periodicity equal to the lead indicated the feasibility of the multi-probe method.

Influence of Surface-Profile Error of Larger Mirror on Aberrations Characteristics of Optical System

2013 ◽  
Vol 33 (4) ◽  
pp. 0422002
Author(s):  
庞志海 Pang Zhihai ◽  
樊学武 Fan Xuewu ◽  
陈钦芳 Chen Qinfang ◽  
马臻 Ma Zhen ◽  
邹刚毅 Zou Gangyi
Keyword(s):  
Optical System ◽  
Surface Profile ◽  
Profile Error

A Multi-Probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM

2010 ◽  
Vol 447-448 ◽  
pp. 590-594 ◽  
Author(s):  
Ping Yang ◽  
Shusaku Shibata ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu ◽  
Osamu Sato ◽  
...  
Keyword(s):  
High Precision ◽  
Coordinate Measuring Machine ◽  
Simultaneous Equation ◽  
High Accuracy ◽  
Probe Measurement ◽  
Probe Method ◽  
Measuring Machine ◽  
Simulation Results ◽  
Straightness Error ◽  
Laser Interferometers

To develop a high precision Micro Coordinate Measuring Machine (Micro-CMM), it is important to evaluate an X-Y stage on the Micro-CMM. A precision multi-probe measurement system has been designed and developed for simultaneously measuring the yaw and straightness errors of the X-Y stage. In the system, an autocollimator measures the yaw error of the stage, and two laser interferometers measure the profile of a standard mirror which is fixed on the X-Y stage. The straightness error is reconstructed by the application of simultaneous equation and least-squares methods, and the uncertainty associated with the multi-probe method is simulated. When the interval of the laser interferometers equals 10 mm, the standard deviation of multi-probe method using the high accuracy autocollimator and the laser interferometers is about 10 nm. The simulation results satisfy our purpose for the uncertainty of 50 nm, and practical considerations are discussed.

Generation of Milled Surfaces Including Tool Dynamics and Wear

1993 ◽  
Vol 115 (3) ◽  
pp. 245-252 ◽  
Author(s):  
F. Ismail ◽  
M. A. Elbestawi ◽  
R. Du ◽  
K. Urbasik
Keyword(s):  
Tool Wear ◽  
Flank Wear ◽  
Mechanistic Model ◽  
Surface Profile ◽  
Surface Generation ◽  
Profile Error ◽  
Peripheral Milling ◽  
Characteristic Features ◽  
Tool Dynamics ◽  
Good Agreement

In this paper, a mechanistic model for surface generation in peripheral milling, which includes the effects of cutter vibrations, run out, as well as flank wear is presented. The surface roughness parameters, and characteristic features of the surface profile were examined using computer simulations. The results of the simulation runs were verified experimentally and a good agreement was obtained. The results demonstrated clearly the importance of including tool wear in surface generation predictions. It has been shown that the model is capable of predicting the smearing of the surface generated due to increased tool wear. Also, the ploughing force acting on the wear land considered in the model influenced the resulting profile error significantly.

Measurement of Straightness for Two-Dimensional Translatory Stage

2010 ◽  
Vol 437 ◽  
pp. 194-197
Author(s):  
Ryoshu Furutani ◽  
Masakazu Watanabe
Keyword(s):  
Laser Interferometer ◽  
Probe Method ◽  
Two Dimensional ◽  
Profile Error ◽  
Reference Mirror ◽  
One Dimensional ◽  
Dimensional Measurement ◽  
Adjustment Error ◽  
Profile Errors ◽  
The Relationship

The large scaled and high accurate 2D-stage is necessary for nanomanufacturing. In order to measure the position of stage, two direction sensors are used. These sensors measure the displacement from the metrological frame. However in nanometer application, as the profile error of metrological frame is comparable with the accuracy of 2D-stage, it is not negligible. Therefore the measuring result includes the displacement of stages and the profile error of metrological frame. So the multi-probe method is applied in one-dimensional measurement to separate the displacement error from the profile error of the metrological frame. In the multi-probe method, the zero adjustment error cannot be removed. So this article proposes a new method which separates the displacement of 2D-stage from the profile errors of the metrological frames in two directions. In this article, as the laser interferometer is used as the sensor, the measuring data is assumed as the shape of the axis of stages mixed with the profile error of the reference mirror in laser interferometer. The relationship during the measuring data, the shape of the axis and the profile error is described. The shape of axis of stage and the profile error of mirror are derived from the measuring result in experiment.

A Six-Probe Scanning Method for Guide Rail Straightness Measurement

2012 ◽  
Vol 217-219 ◽  
pp. 2669-2673 ◽  
Author(s):  
Jiao Jiao Yang ◽  
Xin Chen ◽  
Guo Qing Ding ◽  
Li Hua Lei ◽  
Yuan Li
Keyword(s):  
Computer Simulation ◽  
Experimental Results ◽  
Guide Rail ◽  
Profile Error ◽  
Scanning Method ◽  
Scanning Process ◽  
Displacement Sensors ◽  
Probe System ◽  
Before And After ◽  
Straightness Error

Straightness error is the main profile error of guide rail. This paper studies a scanning six-probe system for measuring straightness of two guide rails. The system does not use angle sensors and consists of two probe-units, each having three displacement sensors. The two probe-units are moved by a scanning stage to scan the surface of two guide rails, then they are rotated 180 and scan guide rails again after the first scanning. The zero-differences of two probe-units before and after probe-units being rotated, as well as the straightness of the guide rails, can be accurately evaluated from the outputs of the displacement sensors in two scanning process. The effectiveness of this method is confirmed by computer simulation and experimental results in the case of two probe-units having different zero-differences before and after probe-units being rotated.

402 Measurement of an Aspherical Surface Profile : Self-Calibration Method for Profile Error of Probe Sphere

2005 ◽  
Vol 2005.40 (0) ◽  
pp. 140-141
Author(s):  
Atsushi SHIBUYA ◽  
Yoshikazu ARAI ◽  
Wei GAO ◽  
Hiroki SHIMIZU ◽  
Satoshi KIYONO
Keyword(s):  
Surface Profile ◽  
Calibration Method ◽  
Profile Error ◽  
Aspherical Surface ◽  
Self Calibration
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