The Preparation and Properties of TiN/Carbon Coatings by Ion Beam Assistant Magnetron Spurting Deposition

2008 ◽  
Vol 373-374 ◽  
pp. 146-150
Author(s):  
Jun Du ◽  
Wen J. He
Keyword(s):  
Fracture Toughness ◽  
Wear Rate ◽  
Adhesion Strength ◽  
Tribological Properties ◽  
Carbon Coating ◽  
Ion Beam ◽  
Multilayer Coating ◽  
Multilayer Coatings ◽  
Tin Coating ◽  
Carbon Coatings

TiN/carbon multilayer coatings were deposited on M2 and GCr15 wafers by ion beam assistant magnetron spurting deposition (IBMSD). The hardness, elastic modulus, fracture toughness, adhesion strength and tribological properties were investigated. The results show that TiN coating by means of static recoil N+ doped interface preparation and Ar+ beam assistant magnetron spurting has 2 times adhesion strength, 5 times hardness of none-beam-assistant TiN coating. The wear rate of GCr15 wafer with TiN(2h)/Carbon(4h) multilayer coating is 0.36×10-15m3/Nm,1/5 of that of GC15 wafer without coating. The wear rate of M2 wafer with TiN(2h)/Carbon(4h) multilayer coating is 2.8×10-15m3/Nm, 1/8 of that of M2 wafer without coating. The friction coefficient of GCr15 wafter with TiN(2h)/Carbon(4h) multilayer coating is lower than 0.15, and that is 0.04 for M2 wafer. These results indicate that thickness ratio of TiN to carbon is important for the tribological properties of TiN/carbon coating, thick lubricant carbon/thin load-support TiN multilayer coating has better comprehensive tribological properties.

Microtribological properties of hard amorphous carbon protective coatings for thin-film magnetic disks and heads

1997 ◽  
Vol 211 (4) ◽  
pp. 365-372 ◽  
Author(s):  
V N Koinkar ◽  
B Bhushan
Keyword(s):  
Amorphous Carbon ◽  
Carbon Coating ◽  
Protective Coatings ◽  
Ion Beam ◽  
Crystal Silicon ◽  
Carbon Coatings ◽  
Magnetic Disks ◽  
Hydrogenated Amorphous Carbon ◽  
Hydrogenated Amorphous ◽  
Cathodic Arc

For long durability of magnetic media and head sliders, protective overcoats of hydrogenated amorphous carbon (a-C:H) are generally used. In this study, microtribological studies of hydrogenated amorphous carbon coatings deposited on a single-crystal silicon using three different deposition techniques—sputtering, ion beam and cathodic arc—were studied using atomic force/friction force microscopy (AFM/FFM). Roughnesses of all coatings at two scan sizes of 1 μm × 1 μm and 10 μm × 10 μm are comparable. Surface topography of sputtered carbon coating shows some particulates on the surface. Cathodic arc carbon coating exhibits the lowest coefficient of friction value followed by ion beam and sputtered carbon coatings. Microscratch and wear resistance and nanohardness of cathodic arc carbon coating are superior to those of ion beam and sputtered carbon coatings. Cathodic arc deposited carbon coatings are potential candidates for magnetic disks and heads.

Nanowear of Multilayer [(TiCx/Ti/C)÷a-C]n Coatings

2018 ◽  
Vol 279 ◽  
pp. 153-159 ◽  
Author(s):  
Anna P. Rubshtein ◽  
Alexander B. Vladimirov ◽  
Sergey A. Plotnikov
Keyword(s):  
Wear Rate ◽  
Tool Steel ◽  
Elasticity Modulus ◽  
Multilayer Coating ◽  
Wear Test ◽  
Constant Load ◽  
Multilayer Coatings ◽  
Diamond Indenter ◽  
Low Wear

Hard multilayer coatings are technologically promising materials for reducing wear of tribological parts. Multilayer coatings with a systematic alternation of the pair [(TiCx/Ti/C)÷(a-C)] were deposited on stainless and tool steel by the PVD technique. Hardness (H), elasticity modulus (E) and critical cracking load (Pcr) were determined by the nanoindentation method. Nanofrictional wear test was conducted under multipass sliding of a diamond indenter (Ø 50 nm) under constant load. The specific coefficient of nanofrictional wear of [(TiCx/Ti/C)÷(a-C)]nwith different composition of titanium-containing layers was determined. The nanofrictional wear rate of [(TiCx/Ti/C)÷a-C]ndepends on the elastic and plastic characteristics of multilayer coating as a whole. Coatings having H3/E2> 0.12 and Pcr> 58 mN demonstrate low wear rate.

Tribological Properties and Corrosion Resistance Properties of NbN/TiN Multilayer, TiNb-NX Single-Layer and Coatings that are Doped with Carbon

2021 ◽  
Vol 901 ◽  
pp. 208-218
Author(s):  
Kun Lin Kuo ◽  
Yen Liang Su ◽  
Wen Hsien Kao ◽  
Yin Hsiang Mao ◽  
Tang Wei Liang
Keyword(s):  
Corrosion Resistance ◽  
Wear Rate ◽  
Tribological Properties ◽  
Solid Lubricant ◽  
Single Layer ◽  
Rf Magnetron Sputtering ◽  
Corrosion Current ◽  
Multilayer Coatings ◽  
Pitting Potential ◽  
Aisi 52100

NbN/TiN, TiNb-NX and CH-TiNb-N12 coatings are deposited by RF magnetron sputtering to determine the tribological properties and corrosion resistance. ‘x’ is the flux rate for nitrogen and ‘CH’ signifies the addition of acetylene. In terms of the corrosion resistance, all the coatings have a similar corrosion potential and NbN/TiN multilayer coatings exhibit the lowest corrosion current. The NbN/TiN multilayer has a low pitting potential so severe pitting corrosion is observed on the surface. CH-TiNb-N12 coating is most resistant to corrosion and exhibits no pitting before the test ends. In contact with counter-bodies with a Si3N4 ball or an AISI 52100 ball, a CH-TiNb-N12 coating acts as a solid lubricant so the wear mechanism shows the least abrasion. The CH-TiNb-N12 coating has the lowest wear rate and coefficient of friction for sliding against Si3N4 and AISI 52100 balls. The wear rate is respectively 3.2 and 6.8 times less than that for SKH51 substrate when sliding against Si3N4 and AISI 52100 balls. The results for this study show that a TiNb-N12-CH coating has the best tribological properties and corrosion resistance.

TRIBOLOGICAL PROPERTIES OF TI/A-C:H NANOCOMPOSITE CARBON BASED COATINGS

Tribologia ◽  
2016 ◽  
Vol 267 (3) ◽  
pp. 109-117
Author(s):  
Marcin KOT ◽  
Łukasz MAJOR ◽  
Jurgen LACKNER ◽  
Kinga CHRONOWSKA-PRZYWARA
Keyword(s):  
Friction Coefficient ◽  
Tribological Properties ◽  
Fracture Resistance ◽  
Carbon Coating ◽  
Vacuum Chamber ◽  
Elasticity Modulus ◽  
Gas Flows ◽  
Scratch Testing ◽  
Carbon Coatings ◽  
Wear And Friction

The paper presents the results of mechanical and tribological tests of Ti/a-C:H nanocomposite carbon coatings and a-C:H hydrogenated carbon coating. All coatings were deposited by magnetron sputtering technique at various acetylene gas flows in a vacuum chamber, resulting in different coatings properties. The conducted study determines hardness, elasticity modulus, fracture resistance, and tribological properties – wear and friction coefficient of deposited coatings. The lowest wear and coefficient of friction were exhibited coatings deposited at higher acetylene flows, 15-20 sccm. However, they are brittle and the critical load in scratch testing is several times smaller than in a case of softer coatings deposited at lower acetylene flow up to 10 sccm.

Research on Microstructure and Properties of TiN, (Ti, Al)N and TiN/(Ti, Al)N Multilayer Coatings

2007 ◽  
Vol 534-536 ◽  
pp. 1225-1228
Author(s):  
Wang She Quan ◽  
Chen Li ◽  
Yin Fei ◽  
Li Jia
Keyword(s):  
Electron Probe Microanalysis ◽  
Electron Spectroscopy ◽  
Electron Probe ◽  
Multilayer Coating ◽  
Cutting Performance ◽  
Multilayer Coatings ◽  
X Ray Diffraction ◽  
Tin Coating ◽  
X Ray ◽  
Scanning Electron

Magnetron sputtered TiN, (Ti, Al)N and TiN/(Ti, Al)N multilayer coatings grown on cemented carbide substrates have been characterized by using electron probe microanalysis (EPMA), X-ray diffraction (XRD), scanning electron spectroscopy (SEM), nanoindentation, scratcher and cutting tests. Results show that TiN coating is bell mouth columnar structures, (Ti, Al)N coating is straight columnar structures and the modulation structure has been formed in the TiN/(Ti, Al)N multilayer coating. TiN/(Ti, Al)N multilayer coating exhibited higher hardness, better adhesion with substrate and excellent cutting performance compared with TiN and (Ti, Al)N coating.

Carbon Coating for Electron Beam Testing and Focus Ion Beam Reconfiguration

1996 ◽  
Author(s):  
P. Perdu ◽  
G. Perez ◽  
M. Dupire ◽  
B. Benteo
Keyword(s):  
Electron Beam ◽  
Sample Preparation ◽  
Carbon Coating ◽  
Focused Ion Beam ◽  
Sacrificial Layer ◽  
Ion Beam ◽  
Electrical Characterization ◽  
Fault Analysis ◽  
Voltage Contrast ◽  
The Right

Abstract To debug ASIC we likely use accurate tools such as an electron beam tester (Ebeam tester) and a Focused Ion Beam (FIB). Interactions between ions or electrons and the target device build charge up on its upper glassivation layer. This charge up could trigger several problems. With Ebeam testing, it sharply decreases voltage contrast during Image Fault Analysis and hide static voltage contrast. During ASIC reconfiguration with FIB, it could induce damages in the glassivation layer. Sample preparation is getting a key issue and we show how we can deal with it by optimizing carbon coating of the devices. Coating is done by an evaporator. For focused ion beam reconfiguration, we need a very thick coating. Otherwise the coating could be sputtered away due to imaging. This coating is use either to avoid charge-up on glassivated devices or as a sacrificial layer to avoid short circuits on unglassivated devices. For electron beam Testing, we need a very thin coating, we are now using an electrical characterization method with an insitu control system to obtain the right thin thickness. Carbon coating is a very cheap and useful method for sample preparation. It needs to be tuned according to the tool used.

Experimental study on the effect of surface texture on tribological properties of nanodiamond films under water lubrication

2021 ◽  
pp. 135065012110334
Author(s):  
Ying Yan ◽  
Xuelin Lei ◽  
Yun He
Keyword(s):  
Friction Coefficient ◽  
Wear Rate ◽  
Tribological Properties ◽  
Surface Texture ◽  
Diamond Film ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Water Contact ◽  
Texture Density ◽  
Short Run

The effect of nanoscale surface texture on the frictional and wear performances of nanocrystalline diamond films under water-lubricating conditions were comparatively investigated using a reciprocating ball-on-flat tribometer. Although the untreated nanocrystalline diamond film shows a stable frictional state with an average friction coefficient of 0.26, the subsequent textured films show a beneficial effect on rapidly reducing the friction coefficient, which decreased to a stable value of 0.1. Furthermore, compared with the nanocrystalline diamond coating, the textured films showed a large decreasing rate of the corresponding ball wear rate from 4.16 × 10−3 to 1.15 × 10−3 mm3/N/m. This is due to the fact that the hydrodynamic fluid film composed of water and debris can provide a good lubrication environment, so the entire friction process has reached the state of fluid lubrication. Meanwhile, the surface texture can greatly improve the hydrophilicity of the diamond films, and as the texture density increases, the water contact angle decreases from 94.75° of the nanocrystalline diamond film to 78.5° of the textured films. The proper textured diamond film (NCD90) exhibits superior tribological properties among all tested diamond films, such as short run-in period, low coefficient of friction, and wear rate.

Friction and Wear Behaviors of Solid Lubricants/Polyimide Composites in Liquid Mediums

2010 ◽  
Vol 654-656 ◽  
pp. 2763-2766 ◽  
Author(s):  
Li Wen Mu ◽  
Xin Feng ◽  
Yi Jun Shi ◽  
Huai Yuan Wang ◽  
Xiao Hua Lu
Keyword(s):  
Friction Coefficient ◽  
Wear Rate ◽  
Tribological Properties ◽  
Alkaline Solution ◽  
Dry Friction ◽  
Friction And Wear ◽  
Solid Lubricants ◽  
Polyimide Composites ◽  
Inorganic Fillers ◽  
Ptfe Composites

The tribological properties of polyimide (PI) composites reinforced with graphite or MoS2 sliding in liquid alkali and water as well as dry friction were investigated using a ring-on-ring tester. The results show that the friction coefficient (μ) and wear rate (W) for both graphite/PI and MoS2/PI composites in different liquid mediums are μdry>μwater >μalkali and Wwater>Wdry >Walkali. Results also indicate that the friction coefficient and wear rate of the PI composites filled with different solid lubricants are μMoS2 >μgraphite and W MoS2 >Wgraphite in different liquid mediums. In addition, the hydrophobic inorganic fillers are fit for the reinforcement of polymer-based composites sliding in liquid mediums. It is also concluded from the authors’ work that the wear rate and friction coefficient of polymer-based (such as PI, PTFE) composites in the alkali lubricated conditions is lowest among all the friction conditions. This may be attributed to the ionic hydration in the alkaline solution.

Microstructure, corrosion and tribological properties of Ti(CN) multilayer coatings on 35CrMo steel by CVD

Rare Metals ◽  
2014 ◽  
Vol 39 (11) ◽  
pp. 1314-1320
Author(s):  
Jin Zhang ◽  
Qi Xue ◽  
Song-Xia Li ◽  
Zeng Qin
Keyword(s):  
Tribological Properties ◽  
Multilayer Coatings ◽  
35Crmo Steel

Amorphous Carbon Coatings for Locally Adjusted Tribological Properties in Sheet Bulk Metal Forming

2012 ◽  
Vol 504-506 ◽  
pp. 969-974 ◽  
Author(s):  
Harald Hetzner ◽  
Stephan Tremmel ◽  
Sandro Wartzack
Keyword(s):  
Amorphous Carbon ◽  
Tribological Properties ◽  
Metal Forming ◽  
Friction And Wear ◽  
Wear Properties ◽  
Carbon Coatings ◽  
Bulk Metal ◽  
Bulk Metal Forming ◽  
Friction And Wear Properties ◽  
Amorphous Carbon Coatings

In sheet bulk metal forming, locally adapted friction properties of the contact tool/workpiece are an appropriate means for the targeted enhancement of the material flow, enabling an improved form filling and lowered forming forces. However, the implementation of desirable friction conditions is not trivial. And further, friction is inseparably linked to wear and damage of the contacting surfaces. This calls for a methodological approach in order to consider tribology as a whole already in the early phases of process layout, so that tribological measures which allow fulfilling the requirements concerning local friction and wear properties of the tool surfaces, can already be selected during the conceptual design of the forming tools. Thin tribological coatings are an effective way of improving the friction and wear properties of functional surfaces. Metal-modified amorphous carbon coatings, which are still rather new to the field of metal forming, allow tackling friction and wear simultaneously. Unlike many other types of amorphous carbon, they have the mechanical toughness to be used in sheet bulk metal forming, and at the same time their friction properties can be varied over wide ranges by proper choice of the deposition parameters. Based on concrete research results, the mechanical, structural and special tribological properties of tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W) are presented and discussed against the background of the tribological requirements of a typical sheet bulk metal forming process.

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