A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates

2010 ◽  
Vol 443 ◽  
pp. 693-698 ◽  
Author(s):  
Viboon Tangwarodomnukun ◽  
Jun Wang ◽  
Philip Mathew
Keyword(s):  
Material Removal ◽  
Laser Energy ◽  
Removal Rate ◽  
Water Layer ◽  
Traverse Speed ◽  
Laser Micromachining ◽  
Pulse Frequency ◽  
Silicon Substrates ◽  
Underwater Laser ◽  
Cut Surface

Laser micromachining has been widely used for decades to fabricate the micro- and submicro-component structures. However, thermal and physical damages are crucial issues associated with the process. Underwater laser ablation has been developed as a damage-free micro-ablation technique. In this paper, a comparison of the conventional dry and underwater laser micromachining of silicon is presented. It shows that the heat affected zone (HAZ) can be reduced significantly in the underwater laser process, though the material removal rate is reduced due to the energy loss by the water layer. The effects of pulse frequency, traverse speed and laser energy on the obtained kerf width, HAZ and cut surface quality are also analyzed and discussed.

Laser Micromachining of Titanium Alloy in Water with Different Temperatures

2018 ◽  
Vol 777 ◽  
pp. 333-338 ◽  
Author(s):  
Taweeporn Wuttisarn ◽  
Viboon Tangwarodomnukun ◽  
Chaiya Dumkum
Keyword(s):  
Titanium Alloy ◽  
Water Temperature ◽  
Laser Power ◽  
Laser Energy ◽  
Traverse Speed ◽  
Laser Micromachining ◽  
Machining Process ◽  
Laser Ablation Process ◽  
Different Temperatures ◽  
Underwater Laser

Underwater laser machining process has been employed as an alternative process to ablate materials with minimum thermal damage. Though many studies provide comprehensive investigations to enable the understanding of laser-water-material interactions during the laser ablation process in water, the effect of water temperature on the ablation performance has not been revealed yet. To cope with this challenge, this paper presents the roles of water temperature on cut dimensions in the underwater laser micromachining of titanium alloy (Ti-6Al-4V). The effects of laser power, traverse speed and number of laser passes were also examined in this study, where groove width and depth were measured and analyzed. The experimental results showed that a deep cut can be produced by using slow traverse speed with multiple-pass technique. However, using too high laser power can cause a shallow cut due to the large formation of recast in the laser-ablated area. According to the findings of this study, the laser energy density of about 750 J/mm2can provide the deepest cut among the other conditions examined in this study.

scholarly journals Impacts of Traverse Speed and Material Thickness on Abrasive Waterjet Contour Cutting of Austenitic Stainless Steel AISI 304L

2021 ◽  
Vol 11 (11) ◽  
pp. 4925
Author(s):  
Jennifer Milaor Llanto ◽  
Majid Tolouei-Rad ◽  
Ana Vafadar ◽  
Muhammad Aamir
Keyword(s):  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Traverse Speed ◽  
Abrasive Waterjet ◽  
Taper Angle ◽  
Material Thickness ◽  
Abrasive Waterjet Machining ◽  
Kerf Taper ◽  
Waterjet Machining

Abrasive water jet machining is a proficient alternative for cutting difficult-to-machine materials with complex geometries, such as austenitic stainless steel 304L (AISI304L). However, due to differences in machining responses for varied material conditions, the abrasive waterjet machining experiences challenges including kerf geometric inaccuracy and low material removal rate. In this study, an abrasive waterjet machining is employed to perform contour cutting of different profiles to investigate the impacts of traverse speed and material thickness in achieving lower kerf taper angle and higher material removal rate. Based on experimental investigation, a trend of decreasing the level of traverse speed and material thickness that results in minimum kerf taper angle values of 0.825° for machining curvature profile and 0.916° for line profiles has been observed. In addition, higher traverse speed and material thickness achieved higher material removal rate in cutting different curvature radii and lengths in line profiles with obtained values of 769.50 mm3/min and 751.5 mm3/min, accordingly. The analysis of variance revealed that material thickness had a significant impact on kerf taper angle and material removal rate, contributing within the range of 69–91% and 62–69%, respectively. In contrast, traverse speed was the least factor measuring within the range of 5–18% for kerf taper angle and 27–36% for material removal rate.

Preliminary Study of Ultrasonic Assisted Underwater Laser Micromachining of Silicon

2016 ◽  
Vol 835 ◽  
pp. 139-143
Author(s):  
Wisan Charee ◽  
Viboon Tangwarodomnukun ◽  
Chaiya Dumkum
Keyword(s):  
Laser Beam ◽  
Removal Rate ◽  
Ultrasonic Transducer ◽  
Laser Micromachining ◽  
Depth Of Cut ◽  
Ultrasonic Power ◽  
Surrounding Water ◽  
Ultrasonic Cleaning ◽  
Cut Quality ◽  
Underwater Laser

The disturbances of vapor bubble to a laser beam in the underwater laser machinig process importantly limits the material removal rate and cut quality obtained. This issue is more essential for the laser micromachining process that a precise and small trench cut is highly needed. In this study, the ultrasound was used to energize and break up the bubble while the laser beam was performing a cut in water. Silicon was used as a work sample in this study as its significant usage in many micro-components. An ultrasonic transducer was located nearby the workpiece in an attempt to vibrate surrounding water. The results revealed that an increase in ultrasonic power increased the width and depth of cut channel. In addition, the workpiece surface obtained after the ablation was clean as similar to that performed by the ultrasonic cleaning. This combination of laser machining and ultrasonic cleaning processes can be another effective approach to cut thermal sensitive materials and also small components whose thermal damage and deposition of cut debris can be harmful to their functionality after laser ablation.

Investigation of Process Performances and Cut Surface Characteristics in the Wire-EDMing of Silicon

2013 ◽  
Vol 845 ◽  
pp. 950-954 ◽  
Author(s):  
J. Punturat ◽  
Viboon Tangwarodomnukun ◽  
Chaiya Dumkum
Keyword(s):  
Silicon Wafer ◽  
Material Removal ◽  
Removal Rate ◽  
Surface Characteristics ◽  
Electrode Wear ◽  
Machined Surface ◽  
The Wire ◽  
P Type ◽  
Cut Surface ◽  
Rough Cut

Wire-EDMing process has been more accepted for cutting and slicing silicon wafer as it can provide a cut with less crack and chipping due to low effect of mechanical stresses. In order to provide a deep analysis of the process, the wire-EDMing performances and cut surface characteristics of p-type (100) monocrystalline silicon wafer have been experimentally investigated in this study. The results have shown that wide kerf width, high material removal rate, large electrode wear and rough cut surface can be obtained under the condition of high open voltage and rough cutting mode. Some micrographs of cut surface morphology have been also reported and discussed, where many craters and small holes can be apparently seen on the machined surface.

scholarly journals Impacts of traverse speed and material thickness in abrasive waterjet contour cutting of Austenitic stainless steel AISI 304L

2021 ◽  
Author(s):  
Jennifer llanto ◽  
Majid Tolouei-Rad ◽  
Ana Vafadar ◽  
Muhammad Aamir
Keyword(s):  
Stainless Steel ◽  
Austenitic Stainless Steel ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Traverse Speed ◽  
Abrasive Waterjet ◽  
Taper Angle ◽  
Material Thickness ◽  
Kerf Taper

Abstract Austenitic stainless steel 304L (AISI304L), of varied thickness, is widely used in the fabrication industry and in many cases, it requires contour machining for achieving intricate profiles. Abrasive water jet machine is a proficient alternative for machining difficult-to-cut, reflective, conductive, and heat-sensitive materials such as austenitic stainless steel with complex geometries. However, due to differences in machining responses for varied material conditions, the abrasive waterjet machine experiences challenges such as kerf geometric inaccuracy and low material removal rate. In this study, an abrasive waterjet machine is employed to perform contour cutting of different profiles to investigate the impacts of traverse speed and material thickness in achieving a lower kerf taper angle and higher material removal rate. Experimental results show that all profiles encountered a similar trend of obtaining higher kerf taper angle and material removal rate as traverse speed increased. Analysis of variance revealed that material thickness denotes a more significant impact to kerf taper angle and material removal rate with a contribution within the range of 69%-91% and 62-69% respectively; whereas traverse speed indicates the least contributing factor within the range of 5%-18% in kerf taper angle and 27%-36% for material removal rate.

scholarly journals Investigation of the Effects of Machining Parameters on Material Removal Rate in Abrasive Waterjet Turning

2014 ◽  
Vol 6 ◽  
pp. 624203 ◽  
Author(s):  
Iman Zohourkari ◽  
Mehdi Zohoor ◽  
Massimiliano Annoni
Keyword(s):  
Flow Rate ◽  
Material Removal Rate ◽  
Rotational Speed ◽  
Material Removal ◽  
Removal Rate ◽  
Traverse Speed ◽  
Abrasive Waterjet ◽  
Depth Of Cut ◽  
Machining Parameters ◽  
Cutting Head

The effects of the main operational machining parameters on the material removal rate (MRR) in abrasive waterjet turning (AWJT) are presented in this paper using a statistical approach. The five most common machining parameters such as water pressure, abrasive mass flow rate, cutting head traverse speed, workpiece rotational speed, and depth of cut have been put into a five-level central composite rotatable experimental design (CCRD). The main effects of parameters and the interaction among them were analyzed by means of the analysis of variance (ANOVA) and the response surfaces for MRR were obtained fitting a second-order polynomial function. It has been found that depth of cut and cutting head traverse speed are the most influential parameters, whereas the rotational speed is insignificant. In addition, the investigations show that interactions between traverse speed and pressure, abrasive mass flow rate and depth of cut, and pressure and depth of cut are significant on MRR. This result advances the AWJT state of the art. A complete model discussion has been reported drawing interesting considerations on the AWJT process characterising phenomena, where parameters interactions play a fundamental role.

Parametric Study of Pulsed CO2 Laser Surface Treatment of Alumina Ceramics

2015 ◽  
Vol 15 (3) ◽  
pp. 301-308
Author(s):  
A. Bharatish ◽  
H. N. Narasimha Murthy ◽  
Ajithkumar Radder ◽  
V. Mamatha ◽  
B. Anand ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Material Removal Rate ◽  
Laser Power ◽  
Material Removal ◽  
Removal Rate ◽  
Scanning Speed ◽  
Pulse Frequency ◽  
Alumina Ceramics ◽  
Laser Surface Treatment ◽  
Grey Relational

AbstractThis paper focuses on investigating the influence of laser power, pulse frequency and scanning speed on material removal rate and surface roughness during CO2 laser surface treatment of alumina ceramics. Pulse frequency and laser power were the significant factors influencing the material removal rate and surface roughness, respectively. Adequate response surface models were established to correlate the laser parameters and the measured responses. Grey relational analysis predicted the optimal responses at 90 W laser power, 5 kHz pulse frequency and 400 mm/s scanning speed. Desirability function based Multi objective optimization results indicated that minimum material removal rate (0.5117 mm3/s) and surface roughness (0.5968 µm) are achieved at 90 W laser power, 5 kHz pulse frequency and 337.37 mm/s scanning speed which were in close agreement with Grey Relational results. Increase in homogeneity and smoothness of the laser treated alumina surface along with formation of micro recast particles away from the laser traverse path were evidenced by the SEM micrographs.

Effect of rotation direction, traverse speed, and abrasive type during the hydroabrasive disintegration of a rotating Ti6Al4V workpiece

2020 ◽  
pp. 095440542097122
Author(s):  
Petr Hlavacek ◽  
Sergej Hloch ◽  
Akash Nag ◽  
Jana Petru ◽  
Miroslav Muller ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Traverse Speed ◽  
Machining Parameters ◽  
Abrasive Particles ◽  
Rotation Direction ◽  
Cartesian Coordinate ◽  
The Right

In this study, a new methodology is considered for determining the rotational senses (clockwise or anti-clockwise) of a workpiece during the hydroabrasive disintegration of rotating samples. The rotational directions are taken with respect to the position of the abrasive jet, that is, keeping it on the right side of the rotating workpiece when viewed from the free end in the cartesian coordinate system. Measurements were carried out for diameter deviation, material removal rate and surface roughness as a response to machining parameters such as traverse speed, workpiece rotation direction and abrasive grain. Final diameter of the workpiece (10.28–14.12 mm), material removal rate (1154–3936 mm3/min) and surface roughness (6.65–25.43 µm) values increase with increasing value of traverse speed (5–25 mm/min) using anti-clockwise rotation with Australian garnet abrasive grains. ANOVA analysis of the responses shows that traverse speed ( p = 0.000) is a statistically significant parameter for predicting all the machining responses. Abrasive type and rotational direction were statistically significant for determining diameter deviation ( p = 0.017, 0.006) and material removal rate ( p = 0.000, 0.000) but insignificant for surface roughness ( p = 0.373, 0.367). Scanning electron microscopy provided information on the surface morphology, depicting the characteristics of the disintegrated surface. Disintegrated features, like peak and valley formations, craters, holes, cutting traces and embedded abrasive particles on the surface were observed.

scholarly journals Analysis and Optimization of Process Parameters in Abrasive Waterjet Contour Cutting of AISI 304L

Metals ◽  
2021 ◽  
Vol 11 (9) ◽  
pp. 1362
Author(s):  
Jennifer Milaor Llanto ◽  
Ana Vafadar ◽  
Muhammad Aamir ◽  
Majid Tolouei-Rad
Keyword(s):  
Surface Roughness ◽  
Mass Flow Rate ◽  
Mass Flow ◽  
Process Parameters ◽  
Flow Rate ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Traverse Speed ◽  
Abrasive Waterjet

Abrasive waterjet machining is applied in various industries for contour cutting of heat-sensitive and difficult-to-cut materials like austenitic stainless steel 304L, with the goal of ensuring high surface integrity and efficiency. In alignment with this manufacturing aspiration, experimental analysis and optimization were carried out on abrasive waterjet machining of austenitic stainless steel 304L with the objectives of minimizing surface roughness and maximizing material removal rate. In this machining process, process parameters are critical factors influencing contour cutting performance. Accordingly, Taguchi’s S/N ratio method has been used in this study for the optimization of process parameters. Further in this work, the impacts of input parameters are investigated, including waterjet pressure, abrasive mass flow rate, traverse speed and material thickness on material removal rate and surface roughness. The study reveals that an increasing level of waterjet pressure and abrasive mass flow rate achieved better surface integrity and higher material removal values. The average S/N ratio results indicate an optimum value of waterjet pressure at 300 MPa and abrasive mass flow rate of 500 g/min achieved minimum surface roughness and maximum material removal rate. It was also found that an optimized value of a traverse speed at 90 mm/min generates the lowest surface roughness and 150 mm/min produces the highest rate of material removed. Moreover, analysis of variance in the study showed that material thickness was the most influencing parameter on surface roughness and material removal rate, with a percentage contribution ranging 90.72–97.74% and 65.55–78.17%, respectively.

Research on Endless Wire Saw Cutting of Al2O3/TiC Ceramics

2006 ◽  
Vol 315-316 ◽  
pp. 571-574 ◽  
Author(s):  
J.F. Meng ◽  
Jian Feng Li ◽  
Pei Qi Ge ◽  
R. Zhou
Keyword(s):  
Surface Roughness ◽  
Material Removal Rate ◽  
Feed Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Wire Saw ◽  
Wire Cutting ◽  
Wire Wear ◽  
Cut Surface ◽  
Fixed Abrasive

This article investigates the cutting of Al2O3/TiC ceramics using a fixed abrasive diamond endless wire. The effect of wire speed and feed rate on material removal rate, cutting force, surface roughness and wire wear is investigated. The cut surface of Al2O3 /TiC ceramics is studied. This study demonstrates the advantage of fixed abrasive diamond endless wire cutting of Al2O3/TiC ceramics.

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