The Mean Projected Range and Range Straggling of Nd Ions Implanted in Silicon Carbide

2011 ◽  
Vol 474-476 ◽  
pp. 565-569
Author(s):  
Xi Feng Qin ◽  
Shuang Li ◽  
Feng Xiang Wang ◽  
Yi Liang

In view of the influence of the projected range, the range straggling, and the lateral deviation of ions in materials on the property of device in the fabrication of photoelectric integration devices by ion implantation, the mean projected ranges and range straggling for energetic 200 – 500 keV Nd ions implanted in 6H-SiC were measured by means of Rutherford backscattering followed by spectrum analysis. The measured values are compared with Monte Carlo code (SRIM2006) calculations. It has been found that the measured values of the mean projected range Rp are good agreement with the SRIM calculated values; for the range straggling △Rp, the difference between the experiment data and the calculated results is much higher than that of Rp

2014 ◽  
Vol 599-601 ◽  
pp. 160-163
Author(s):  
Xi Feng Qin ◽  
Gui Jie Ma ◽  
Shu Hua Shi ◽  
Feng Xiang Wang

The mean projected ranges and range straggling for energetic 200 – 500 keV Yb ions implanted in 6H-SiC were measured by means of Rutherford backscattering followed by spectrum analysis. The measured values are compared with Monte Carlo code (SRIM2012) calculations. It has been found that the measured values of the mean projected range are good agreement with the SRIM calculated values; for the range straggling , the difference between the experiment data and the calculated results is much higher than that of .


2011 ◽  
Vol 306-307 ◽  
pp. 315-318
Author(s):  
Yi Liang ◽  
Hong Zhen Li ◽  
Shuang Li ◽  
Feng Xiang Wang ◽  
Xi Feng Qin

In view of the influence of the projected range, the range straggling, and the lateral deviation of ions in materials on the property of photoelectric integration devices fabricated by ion implantation, the mean projected ranges and range straggling for energetic 200 – 500 keV neodymium (Nd) ions implanted in silicon-on-insulator (SOI) at room temperature were measured by means of Rutherford backscattering followed by spectrum analysis.The measured results are compared with Monte Carlo code (SRIM2006) predictions. Our results show that the measured values of the mean projected rangeRpare good agreement with the SRIM calculated values; for the range straggling ΔRp, the difference between the experiment data and the calculated results is much higher than that ofRp.


2014 ◽  
Vol 488-489 ◽  
pp. 269-272
Author(s):  
Xi Feng Qin ◽  
Gui Jie Ma ◽  
Shu Hua Shi ◽  
Gang Fu

The mean projected ranges and range straggling for energetic 200 500 keV Yb ions implanted in silicon-on-insulator (SOI) were measured by means of Rutherford backscattering followed by spectrum analysis. The measured values are compared with Monte Carlo code (SRIM2012) calculations. It has been found that the measured values of the mean projected range are good agreement with the SRIM calculated values; for the range straggling , the difference between the experiment data and the calculated results is much higher than that of .


2012 ◽  
Vol 463-464 ◽  
pp. 798-801
Author(s):  
Xi Feng Qin ◽  
Hui Ning Wang ◽  
Zi Wu Ji ◽  
Feng Xiang Wang ◽  
Gang Fu

Due to the need to reduce electronic device sizes, it is very important to consider the depth distribution of ions implanted into a crystalline target. The mean projected ranges and range straggling for energetic 200-500 keV Er ions implanted in 6H-SiC were measured by means of Rutherford backscattering followed by spectrum analysis. The measured values are compared with Monte Carlo code (SRIM2010) calculations. It has been found that the measured values of the mean projected range RP are good agreement with the SRIM calculated values; for the range straggling ΔRp, the difference between the experiment data and the calculated results is much higher than that of Rp.


2011 ◽  
Vol 214 ◽  
pp. 522-525
Author(s):  
Xi Feng Qin ◽  
Shuang Li ◽  
Feng Xiang Wang ◽  
Yi Liang

It is very important to consider the distribution of range, range straggling and lateral spread of ions implanted into semiconductor materials in design and fabrication of semiconductor integration devices by ion implantation. The mean projected ranges and range straggling for energetic 200 – 500 keV Er ions implanted in silicon-on-insulator (SOI) were measured by means of Rutherford backscattering followed by spectrum analysis. The measured values are compared with Monte Carlo code (SRIM2006) calculations. It has been found that the measured values of the mean projected range are good agreement with the SRIM calculated values; for the range straggling , the difference between the experiment data and the calculated results is much higher than that of .


2011 ◽  
Vol 214 ◽  
pp. 593-596
Author(s):  
Xi Feng Qin ◽  
Shuang Li ◽  
Feng Xiang Wang ◽  
Yi Liang

Due to the need to reduce electronic device sizes, it is very important to consider the depth distribution of ions implanted into a crystalline target. The mean projected ranges and range straggling for energetic 200 – 500 keV Nd ions implanted in single crystal silicon (c-Si) at room temperature were measured by means of Rutherford backscattering followed by spectrum analysis. The measured results are compared with Monte Carlo code (SRIM2006) predictions. Our results show that the measured values of the mean projected range are good agreement with the SRIM calculated values; for the range straggling , the difference between the experiment data and the calculated results is much higher than that of .


2012 ◽  
Vol 476-478 ◽  
pp. 1249-1253
Author(s):  
Xi Feng Qin ◽  
Hui Ning Wang ◽  
Zi Wu Ji ◽  
Feng Xiang Wang ◽  
Gang Fu

The mean projected ranges and range straggling for energetic 200 – 500 keV Yb ions implanted in single crystal silicon (c-Si) at room temperature were measured by means of Rutherford backscattering followed by spectrum analysis. The measured results are compared with Monte Carlo code (SRIM2010) predictions. Our results show that the measured values of the mean projected range Rp are good agreement with the SRIM calculated values; but the difference of the range straggling ΔRp between the experiment data and the calculated results is much higher than that of Rp.


2011 ◽  
Vol 26 (3) ◽  
pp. 249-253 ◽  
Author(s):  
Vladan Ljubenov ◽  
Rodoljub Simovic

This paper presents the results of research on photon reflection from plane targets based on Monte Carlo simulations performed by the MCNP code. Five materials (water, concrete, aluminum, iron, and copper) are examined in the area of initial photon energies of up to 200 keV. The values of the total number albedo for photons dependent on the initial photon energy or the mean number of photon scatterings are calculated and graphically presented. We have shown that the values of the total number albedo for different target materials, expressed as a function of the mean number of photon scatterings, are in good agreement with each other and can be approximated by simple, universal analytic functions obtained by the least squares method. The accuracy of these analytic appoximations is confirmed by their comparison with the results of PENELOPE and FOTELP Monte Carlo codes.


Author(s):  
Hicham Harrass ◽  
Abdellatif Talbi ◽  
Rodouan Touti

Abstract CR-39 and LR-115 type II solid state nuclear track detectors (SSNTDs) are both used, in order to assess the concentration of nucleus belonging to 238U and 232Th series, these ones can be also used to measure radon 222Rn and thoron 220Rn gases in different locations. In this paper, a Monte Carlo code was developed to calculate the mean critical angle for which alpha particles emitted from 238U and 232Th families in studied material samples reach CR-39 and LR-115 type II surfaces and bring about latent tracks on them. The dependence of the SSNTDs mean critical angle on the removed thickness, the initial alpha particle energy has been studied. A linear relationship between CR-39 mean critical angle and the initial alpha particle energy for different removed thicknesses has been found. This straightforward relationship allows determining quickly the mean critical angle of etching which corresponds to initial alpha particle energy for a given removed thickness. CR-39 mean critical angle ranged from 59° for an alpha particle emitted by 212Po to 71° for an alpha particle emitted by 232Th, for the value of removed thickness of 6 µm; whereas LR-115 type II mean critical angle does not depend on the initial alpha particle energy except for 232Th, 238U, 230Th and 234Ra when the removed thickness ranged from 6 µm to 8 µm. Obtained data by using the current method and those obtained in the literature [18] are in good agreement with each other.


2021 ◽  
Vol 247 ◽  
pp. 02034
Author(s):  
P. Mala ◽  
A. Pautz ◽  
H. Ferroukhi ◽  
A. Vasiliev

Currently, safety analyses mostly rely on codes which solve both the neutronics and the thermal-hydraulics with assembly-wise nodes resolution as multiphysics heterogeneous transport solvers are still too time and memory expensive. The pin-by-pin homogenized codes can be seen as a bridge between the heterogeneous codes and the traditional nodal assembly-wise calculations. In this work, the pin-by-pin simplified transport solver Tortin has been coupled with a sub-channel code COBRA-TF. The verification of the 3D solver of Tortin is presented at first, showing very good agreement in terms of axial and radial power profile with the Monte Carlo code SERPENT for a small minicore and with the state-of-the-art nodal code SIMULATE5 for a quarter core without feedback. Then the results of Tortin+COBRA-TF are compared with SIMULATE5 for one assembly problem with feedback. The axial profiles of power and moderator temperature show good agreement, while the fuel temperature differ by up to 40 K. This is caused mainly by different gap and fuel conductance parameters used in COBRA-TF and in SIMULATE5.


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