Analysis of a 3-DOF Micro-Positioning Stage
2014 ◽
Vol 620
◽
pp. 234-239
◽
Keyword(s):
Firstly a three degrees of freedom micro-positioning stage constructed by flexure hinges is designed, and the simplified model of the stage is established. Secondly, the stiffness of the stage along X, Y direction or around Z direction is deduced by structural mechanics. The difference between finite element method and theory value is less than 7%, so it shows the theory analysis is feasible, further more, stress of the moving stage is analyzed, and the effect curve of the key parameters to the stiffness and stress is obtained. It can be concluded that the stiffness and stress mainly related with the flexure hinge length L and width t, thus it provide a theoretical basis for three-dimensional micro-positioning stage design.
1948 ◽
Vol 44
(3)
◽
pp. 342-344
◽
2018 ◽
Vol 27
(07)
◽
pp. 1850066
Keyword(s):
2020 ◽
2013 ◽
Vol 136
(1)
◽
Keyword(s):
2004 ◽
Vol 126
(4)
◽
pp. 617-624
◽
Keyword(s):
1989 ◽
Vol 111
(3)
◽
pp. 398-402
◽
Keyword(s):