Anomalous Temperature Dependence of the Hall Coefficient of Heavily Al-Doped 4H-SiC Epilayers in the Band Conduction Region

We investigate the temperature dependence of the resistivity and Hall coefficient for heavily Al-doped p-type 4H-SiC epilayers with Al concentrations (C_Al) of > 2E19 cm^−3, which are substrates for the collectors of insulated-gate bipolar transistors. The signs of the measured Hall co- efficients (R_H) changed from positive to negative at low temperatures. For epilayers with C_Al values of < 3E19 cm^−3, a negative R_H was observed in the hopping conduction region. In contrast, for epilayers with C_Al values of > 3E19 cm^−3, a negative R_H was observed in not only the hopping conduction region but also the band conduction region, which is a striking feature because the movement of free holes in the valence band should make R_H positive. For an epilayer with C_Al of 1.8E20 cm^−3, the sign of R_H clearly changed three times in the band conduction region. Moreover, the activation energies of the temperature-dependent R_H values were similar to those of the temperature-dependent resistivity in the corresponding temperature ranges, irrespective of the conduction mechanisms (band and hopping conduction).