Characterization of SiC MOS Structures using Conductance Spectroscopy and Capacitance Voltage Analysis
2000 ◽
Vol 338-342
◽
pp. 1117-1120
◽
Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
2016 ◽
Vol 858
◽
pp. 685-688
◽
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