Characterisation of Titanium Nitride Thin Films Deposited by Cathodic Arc Plasma Technique on AISI D6 Tool Steel

2005 ◽  
Vol 498-499 ◽  
pp. 717-721 ◽  
Author(s):  
R.A. Vieira ◽  
Maria do Carmo de Andrade Nono
Keyword(s):  
Thin Film ◽  
Substrate Temperature ◽  
Tool Steel ◽  
Preferred Orientation ◽  
Interface Region ◽  
Tin Films ◽  
Tin Film ◽  
Electron Image ◽  
Steel Substrates ◽  
Cathodic Arc

TiN thin film has been produced on the surface of AISI D6 tool steel by using a titanium interlayer. In this work, the morphology, the microstructure and interface depth profile of TiN films deposited at two substrate temperatures (220 oC and 450 oC) in the coating process are presented and discussed. The AISI D6 tool steel substrates were coated with titanium thin film as the underlayer and with TiN thin film as the top layer. They were deposited by conventional cathodic arc process. The surfaces of TiN films were observed by scanning electron microscopy (SEM). The microstructure of these samples was analysed by X-ray diffractometry (XRD). The influence of the substrate temperature on the TiN film-Ti film-AISI D6 interface region were investigated by energy dispersive spectrometry (EDS) and its cross section were observed using backscattered electron image (BEI). The results showed that TiN films deposited at 220 oC formed a film of strongly (111) preferred orientation, while in 450 oC formed a film of (111) and (220) preferred orientation. The thickness of the TiN films increased with increasing substrate temperature. The results show that the interface region of the TiN film-Ti film-AISI D6 substrate system was significantly improved when higher substrate temperature during deposition is used.

Characteristics of TiN film deposited on stellite using reactive magnetron sputter ion plating

1997 ◽  
Vol 12 (9) ◽  
pp. 2393-2400 ◽  
Author(s):  
Min-Ku Lee ◽  
Hee-Soo Kang ◽  
Whung-Whoe Kim ◽  
Joung-Soo Kim ◽  
Won-Jong Lee
Keyword(s):  
Ion Bombardment ◽  
Columnar Structure ◽  
Preferred Orientation ◽  
Substrate Bias ◽  
Reactive Magnetron ◽  
Tin Films ◽  
Ion Plating ◽  
Tin Film ◽  
Carbon Impurities ◽  
Magnetron Sputter

TiN films were deposited onto stellite 6B alloy (Co base) by the reactive magnetron sputter ion plating. As the substrate bias increases, TiN film changes from columnar structure to dense structure with great hardness and smooth surface due to densification and resputtering by ion bombardment. The content of oxygen and carbon impurities in the TiN film decreases greatly when the substrate bias is applied. The preferred orientation of the TiN films changes from (200) to (111) with decreasing N2/Ar ratio and from (200) to (111) and then (220) with increasing the substrate bias. The change of the preferred orientation is discussed in terms of surface energy and strain energy which are related to the impurity contents and the ion bombardment damage. The hardness of the TiN film increases with increasing compressive stress generated in the film by virtue of ion bombardment. It becomes as high as up to 3500 kgf/mm2 when an appropriate substrate bias is applied.

Influence of Substrate Temperature on the Structure of Tin-Films

1986 ◽  
Vol 68 ◽  
Author(s):  
J. M. Molarius ◽  
A. S. Korhonen ◽  
E. Erola ◽  
E. Nykanen
Keyword(s):  
Substrate Temperature ◽  
Preferred Orientation ◽  
Tin Films ◽  
X Ray ◽  
Ion Plating ◽  
Nitrogen Concentrations ◽  
Influence Of Substrate ◽  
Nitrogen Contents ◽  
Dense Films

AbstractThree series of Ti-N films with varying nitrogen contents from about 8 to 52 at.% N were deposited by triode ion plating at temperatures of 773, 623 and 373 K, respectively.Marked changes in the structures of the films with decreasing temperature were observed by x-ray diffraction.Stoichiometric δ-TiN which showed (220) preferred orientation at 773 K changed to (111) at lower temperatures.At intermediate nitrogen concentrations α-Ti (002) decreased and a new ε-Ti2N (002) developed with decreasing temperature.Very smooth and dense films could be produced at the lower temperatures.

scholarly journals Fabrication, micro-structure characteristics and transport properties of co-evaporated thin films of Bi2Te3 on AlN coated stainless steel foils

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Aziz Ahmed ◽  
Seungwoo Han
Keyword(s):  
Thin Film ◽  
Crystal Structure ◽  
Thin Films ◽  
Stainless Steel ◽  
Substrate Temperature ◽  
Transport Properties ◽  
Structural Defects ◽  
Film Composition ◽  
High Substrate ◽  
Foil Substrate

AbstractN-type bismuth telluride (Bi2Te3) thin films were prepared on an aluminum nitride (AlN)-coated stainless steel foil substrate to obtain optimal thermoelectric performance. The thermal co-evaporation method was adopted so that we could vary the thin film composition, enabling us to investigate the relationship between the film composition, microstructure, crystal preferred orientation and thermoelectric properties. The influence of the substrate temperature was also investigated by synthesizing two sets of thin film samples; in one set the substrate was kept at room temperature (RT) while in the other set the substrate was maintained at a high temperature, of 300 °C, during deposition. The samples deposited at RT were amorphous in the as-deposited state and therefore were annealed at 280 °C to promote crystallization and phase development. The electrical resistivity and Seebeck coefficient were measured and the results were interpreted. Both the transport properties and crystal structure were observed to be strongly affected by non-stoichiometry and the choice of substrate temperature. We observed columnar microstructures with hexagonal grains and a multi-oriented crystal structure for the thin films deposited at high substrate temperatures, whereas highly (00 l) textured thin films with columns consisting of in-plane layers were fabricated from the stoichiometric annealed thin film samples originally synthesized at RT. Special emphasis was placed on examining the nature of tellurium (Te) atom based structural defects and their influence on thin film properties. We report maximum power factor (PF) of 1.35 mW/m K2 for near-stoichiometric film deposited at high substrate temperature, which was the highest among all studied cases.

Change of the critical thickness in the preferred orientation of TiN films

1995 ◽  
Vol 10 (3) ◽  
pp. 634-639 ◽  
Author(s):  
U.C. Oh ◽  
Jung Ho Je ◽  
Jeong Y. Lee
Keyword(s):  
Strain Energy ◽  
Unit Volume ◽  
Critical Thickness ◽  
Preferred Orientation ◽  
Rf Power ◽  
X Ray Diffraction ◽  
Working Pressure ◽  
Cross Sectional ◽  
Tin Films ◽  
Tin Thin Films

Recently it was observed through cross-sectional TEM that the preferred orientation of the TiN thin film was changed from (200) to (111) with thickness. In this study, the process of the change in the preferred orientation was studied near the critical thickness by x-ray diffraction, and the value of the critical thickness could be estimated. The change of the critical thickness was also investigated with the strain energy per unit volume. The strain energy could be changed by controlling the energy of the bombarding particle, i.e., by adjusting the rf power, the working pressure, and the substrate bias in sputtering. The critical thickness was decreased monotonically in all cases as the energy of the bombarding particle or the strain energy per unit volume was increased. These results surely show the dependence of the change of the preferred orientation on the strain energy in the TiN thin films.

The novel positive colossal electroresistance in PbPdO2 thin film with (002) preferred orientation

2021 ◽  
Author(s):  
Hai Jia ◽  
Yue Chen ◽  
Chun Lin ◽  
Yurong Ruan ◽  
Shuiyuan Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Preferred Orientation ◽  
The Novel ◽  
Colossal Electroresistance

scholarly journals Tribological Behaviour of K340 Steel PVD Coated with CrAlSiN Versus Popular Tool Steel Grades

2020 ◽  
Author(s):  
Kazimierz Drozd ◽  
Mariusz Walczak ◽  
Mirosław Szala ◽  
Kamil Gancarczyk
Keyword(s):  
Thin Film ◽  
Tool Steel ◽  
Sliding Wear ◽  
Thermochemical Treatment ◽  
Tool Steels ◽  
Tribological Behaviour ◽  
Wear Performance ◽  
Wear Factor ◽  
Heat Treated ◽  
Steel Grades

The tribological performance of metalwork steel tools is of vital importance in both cold and hot working processes. One solution for improving metal tool life is the application of coatings. This paper investigates the effect of CrAlSiN thin-film PVD-deposition on the tribological behaviour of tool steel K340. The sliding wear performance of the coated K340 steel is analysed in relation to both the uncoated K340 steel and a range of tool steels dedicated to hot- and cold-working, such as X155CrVMo12-1, X37CrMoV5-1, X40CrMoV5-1, 40CrMnMo7 and 90MnCrV8. The investigated tool steels were heat-treated, while K340 was subjected to thermochemical treatment and then coated with a CrAlSiN hard film (K340/CrAlSiN). The hardness, chemical composition, phase structure and microstructure of steels K340 and K340/CrAlSiN are examined. Tribological tests were conducted using the ball-on-disc tester in compliance with the ASTM G99 standard. The tests were performed under dry unidirectional sliding conditions, using an Al2O3 ball as a counterbody. The wear factor and coefficient of friction are estimated and analysed with respect to hardness and alloying composition of the materials under study. SEM observations are made to identify the sliding wear mechanisms of the analysed tool steels and PVD-coated K340 steel. In contrast to the harsh abrasive-adhesive wear mechanism observed for uncoated tool steels, the abrasive wear dominates in case of the AlCrSiN. The deposited thin film effectively prevents the K304 substrate from harsh wear severe degradation. Moreover, thanks to the deposited coating, the K304/CrAlSiN sample has a COF of 0.529 and a wear factor of K=5.68×10−7 m3 N−1 m−1, while the COF of the reference tool steels ranges from 0.702 to 0.885 and their wear factor ranges from 1.68×10−5 m3 N−1 m−1 to 3.67×10−5 m3 N−1 m−1. The CrAlSiN deposition reduces the wear of the K340 steel and improves its sliding properties, which makes it a promising method for prolonging the service life of metalwork tools.

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