EBSD Sample Preparation: High Energy Ar Ion Milling
2015 ◽
Vol 812
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pp. 309-314
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Keyword(s):
Surface quality development on series of metal samples was investigated using a new Ar ion milling apparatus. The surface quality of samples was characterized by the image quality (IQ) parameter of the electron backscatter diffraction (EBSD) measurement. Ar ion polishing recipes have provided to prepare a surface appropriate for high quality EBSD mapping. The initial surfaces of samples were roughly grinded and polished. High quality surface smoothness could be achieved during the subsequent Ar ion polishing treatment. The optimal angles of Ar ion incidence and the polishing times were determined for several materials.
2016 ◽
Vol 49
(15)
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pp. 155106
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2011 ◽
Vol 702-703
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pp. 169-172
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2020 ◽
Vol 166
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pp. 110406
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2013 ◽
Vol 19
(4)
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pp. 1007-1018
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2009 ◽
Vol 635
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2015 ◽
Vol 812
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pp. 285-290
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