Pattern Collapse of High-Aspect-Ratio Silicon Nanostructures - A Parametric Study

2016 ◽  
Vol 255 ◽  
pp. 136-140 ◽  
Author(s):  
Nandi Vrancken ◽  
Guy Vereecke ◽  
Stef Bal ◽  
Stefanie Sergeant ◽  
Geert Doumen ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Nanostructures ◽  
Complete Structure ◽  
Chemically Modified ◽  
Chemically Modified Surfaces ◽  
Modified Surfaces ◽  
Wet Processing ◽  
Modification Of The Surface

This work focuses on capillary-induced collapse of high-aspect-ratio silicon nanopillars. Modification of the surface chemistry is demonstrated to be an efficient approach for reducing capillary forces and consequently reduce pattern collapse. Special effort is spent on determination of the wetting state of chemically modified surfaces as complete structure wetting is of utmost importance in wet processing. In light of this, an ATR-FTIR based method has been developed to unambiguously distinguish between wetting and non-wetting states.

scholarly journals Strength Analysis of Alternative Airframe Layouts of Regional Aircraft on the Basis of Automated Parametrical Models

Aerospace ◽  
2021 ◽  
Vol 8 (3) ◽  
pp. 80
Author(s):  
Dmitry V. Vedernikov ◽  
Alexander N. Shanygin ◽  
Yury S. Mirgorodsky ◽  
Mikhail D. Levchenkov
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
High Performance ◽  
Strength Analysis ◽  
Labor Input ◽  
Aerodynamic Loading ◽  
Aspect Ratios ◽  
Wide Range ◽  
Parametrical Design

This publication presents the results of complex parametrical strength investigations of typical wings for regional aircrafts obtained by means of the new version of the four-level algorithm (FLA) with the modified module responsible for the analysis of aerodynamic loading. This version of FLA, as well as a base one, is focused on significant decreasing time and labor input of a complex strength analysis of airframes by using simultaneously different principles of decomposition. The base version includes four-level decomposition of airframe and decomposition of strength tasks. The new one realizes additional decomposition of alternative variants of load cases during the process of determination of critical load cases. Such an algorithm is very suitable for strength analysis and designing airframes of regional aircrafts having a wide range of aerodynamic concepts. Results of validation of the new version of FLA for a high-aspect-ratio wing obtained in this work confirmed high performance of the algorithm in decreasing time and labor input of strength analysis of airframes at the preliminary stages of designing. During parametrical design investigation, some interesting results for strut-braced wings having high aspect ratios were obtained.

Wetting Challenges in Cleaning of High Aspect Ratio Nano-Structures

2012 ◽  
Vol 195 ◽  
pp. 235-238 ◽  
Author(s):  
Xiu Mei Xu ◽  
Guy Vereecke ◽  
Erik van den Hoogen ◽  
Jens Smeers ◽  
Silvia Armini ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
New Technology ◽  
Critical Issue ◽  
Silicon Substrates ◽  
Wetting Properties ◽  
Nano Structures ◽  
Wet Processing ◽  
Semiconductor Fabrication ◽  
Technology Nodes

In semiconductor fabrication, pattern collapse of high aspect ratio structures after wet processing has been a critical issue and attracted a lot of interest. On the other hand, very little attention is spent on the potential wetting issues as feature dimensions are continuously scaled down and novel materials with different wetting properties are used in new technology nodes. In this work we investigate the wettability of nanopatterned silicon substrates with different surface modifications.

scholarly journals Adsorption and sensing of CO and NH3 on chemically modified graphene surfaces

RSC Advances ◽  
2020 ◽  
Vol 10 (69) ◽  
pp. 42318-42326
Author(s):  
A. Sahithi ◽  
K. Sumithra
Keyword(s):  
Carbon Monoxide ◽  
Electronic Structure ◽  
Ab Initio ◽  
Density Functional ◽  
Chemically Modified ◽  
Density Functional Methods ◽  
Functional Methods ◽  
Chemically Modified Surfaces ◽  
Modified Surfaces ◽  
Modified Graphene

We have studied the electronic structure and adsorption characteristics of environmentally potent gaseous molecules like carbon monoxide (CO) and ammonia (NH3) on chemically modified surfaces of graphene, employing ab initio density functional methods.

Wetting films on chemically modified surfaces: An x-ray study

1991 ◽  
Vol 44 (19) ◽  
pp. 10869-10879 ◽  
Author(s):  
I. M. Tidswell ◽  
T. A. Rabedeau ◽  
P. S. Pershan ◽  
John P. Folkers ◽  
M. V. Baker ◽  
...  
Keyword(s):  
X Ray ◽  
Chemically Modified ◽  
Wetting Films ◽  
Chemically Modified Surfaces ◽  
Modified Surfaces
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