Is Highly Selective Si3N4/SiO2 Etching Feasible without Phosphoric Acid?

2018 ◽  
Vol 282 ◽  
pp. 147-151
Author(s):  
Chang Jin Son ◽  
Taeh Yeon Kim ◽  
Tae Gun Park ◽  
Sang Woo Lim
Keyword(s):  
Phosphoric Acid ◽  
Etching Rate ◽  
Free Solution

Si3N4 film could be selectively removed by a special H3PO4-free etchant. In order to increase Si3N4 etching rate and Si3N4/SiO2 etch selectivity, various additives were added to H3PO4-free etchant. The optimization of additives into H3PO4-free solution, a comparable Si3N4 etching rate with 50 times increased Si3N4/SiO2 etch selectivity was obtained as compared to the conventional H3PO4 process.

Comparative Study of Pore Characterizations of Anodized Al–0.5 wt.% Cu Thin Films in Oxalic and Phosphoric Acids

NANO ◽  
2019 ◽  
Vol 14 (11) ◽  
pp. 1950140
Author(s):  
Alaa M. Abd-Elnaiem ◽  
S. Moustafa ◽  
T. B. Asafa
Keyword(s):  
Thin Films ◽  
Oxalic Acid ◽  
Phosphoric Acid ◽  
Etching Rate ◽  
Silicon Wafers ◽  
Average Particle ◽  
Text Type ◽  
Type Silicon ◽  
Steady State Current ◽  
Phosphoric Acids

Porous anodic alumina (PAA) thin films, having interconnected pores, were fabricated from Cu-doped aluminum films deposited on [Formula: see text]-type silicon wafers by anodization. The anodization was done at four different anodizing voltages (60[Formula: see text]V, 70[Formula: see text]V, 80[Formula: see text]V and 90[Formula: see text]V) in phosphoric acid and two voltages (60[Formula: see text]V and 70[Formula: see text]V) in oxalic acid. The aluminum and PAA samples were characterized by SEM and XRD while the pore arrangement, pore density, pore diameter, pore circularity and pore regularity were also analyzed. XRD spectra confirmed the aluminum to be crystalline with the dominant plane being (220), the Cu-rich phase have an average particle size of [Formula: see text][Formula: see text]nm uniformly distributed within the Al matrix of 0.4-[Formula: see text]m grain size. The steady-state current density through the anodization increased by 117% and 49% for oxalic and phosphoric acids, respectively, for 10[Formula: see text]V increase (from 60 to 70 V) in anodization voltage. Similarly, the etching rate increased by 100% for oxalic acid and by 40% for phosphoric acid which are responsible for 47% and 29% decreases in anodization duration, respectively. The highest value of circularity obtained for anodized Al–0.5[Formula: see text]wt.% Cu formed in oxalic acid at 60[Formula: see text]V was 0.86, and it was 0.80 for the phosphoric acid at 90[Formula: see text]V. Anodization of Al–0.5[Formula: see text]wt.% Cu films allows the formation of circular pores directly on [Formula: see text]-type silicon wafers which is of importance for future nanofabrication of advanced electronics. The results of anodized Al–0.5[Formula: see text]wt.% Cu thin film were compared with other anodized systems such as anodized pure Al and Al doped with Si.

scholarly journals Carbon-Free Solution-Based Doping for Silicon

Nanomaterials ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 2006
Author(s):  
Sebastiano Caccamo ◽  
Rosaria Anna Puglisi
Keyword(s):  
Phosphoric Acid ◽  
Surface Density ◽  
Organic Molecules ◽  
Charge Carriers ◽  
Free Solution ◽  
Liquid Solutions ◽  
Molecular Doping ◽  
Material Forming ◽  
High Repeatability

Molecular doping is a method to dope semiconductors based on the use of liquid solutions as precursors of the dopant. The molecules are deposited on the material, forming a self-ordered monolayer that conforms to the surfaces, whether they are planar or structured. So far, molecular doping has been used with precursors of organic molecules, which also release the carbon in the semiconductor. The carbon atoms, acting as traps for charge carriers, deteriorate the doping efficiency. For rapid and extensive industrial exploitation, the need for a method that removes carbon has therefore been raised. In this paper, we use phosphoric acid as a precursor of the dopant. It does not contain carbon and has a smaller steric footprint than the molecules used in the literature, thus allowing a much higher predetermined surface density. We demonstrate doses of electrical carriers as high as 3 × 1015 #/cm2, with peaks of 1 × 1020 #/cm3, and high repeatability of the process, indicating an outstanding yield compared to traditional MD methods.

The concerted use of SEM, TEM, and SCM for examination of resin-dentin interfaces

1994 ◽  
Vol 52 ◽  
pp. 476-477
Author(s):  
B. Van Meerbeek ◽  
L. J. Conn ◽  
E. S. Duke
Keyword(s):  
Surface Layer ◽  
Stress Distribution ◽  
Phosphoric Acid ◽  
Bonding Mechanism ◽  
Restorative Dentistry ◽  
Dental Adhesive ◽  
Low Viscosity ◽  
Dentin Adhesives ◽  
Acid Etch ◽  
Tooth Tissue

Restoration of decayed teeth with tooth-colored materials that can be bonded to tooth tissue has been a highly desirable property in restorative dentistry for many years. Advantages of such an adhesive restorative technique over conventional techniques using non-adhesive metal-based restoratives include improved restoration retention with minimal sacrifice of sound tooth tissue for retention purposes, superior adaptation and sealing of the restoration margins in prevention of caries recurrence, improved stress distribution across the tooth-restoration interface throughout the whole tooth, and even reinforcement of weakened tooth structures. The dental adhesive technology is rapidly changing. An efficient resin bond to enamel has already long been achieved. Its bonding mechanism has been fully elucidated and has proven to be a durable and reliable clinical treatment. However, bonding to dentin represents a greater challenge. After the failures of a dentin acid-etch technique in imitation of the enamel phosphoric-acid-etch technique and a bonding procedure based on chemical adhesion, modern dentin adhesives are currently believed to bond to dentin by a micromechanical hybridization process. This process is developed by an initial demineralization of the dentin surface layer with acid etchants exposing a collagen fibril arrangement with interfibrillar microporosities that subsequently become impregnated by low-viscosity monomers. Although the development of such a hybridization process has well been documented in the literature, questions remain with respect to parameters of-primary importance to adhesive efficacy.

Phosphoric Acid from Slags

1884 ◽  
Vol 18 (457supp) ◽  
pp. 7298-7298
Author(s):  
C. Scheibler
Keyword(s):  
Phosphoric Acid

MOTIONS IN A VISCOUS INORGANIC LIQUID : FERROUS ION IN COLD PHOSPHORIC ACID

1976 ◽  
Vol 37 (C6) ◽  
pp. C6-739-C6-743 ◽  
Author(s):  
P. A. FLINN ◽  
B. J. ZABRANSKY ◽  
S. L. RUBY
Keyword(s):  
Phosphoric Acid ◽  
Ferrous Ion

CLINICAL INVESTIGATIONS OF A LONG-ACTING OESTRIOL (POLYOESTRIOL PHOSPHATE)

1961 ◽  
Vol 38 (1) ◽  
pp. 73-87 ◽  
Author(s):  
Christian Lauritzen ◽  
Semih Velibese
Keyword(s):  
Side Effects ◽  
Phosphoric Acid ◽  
Quantitative Data ◽  
Water Soluble ◽  
Cholesterol Concentration ◽  
Experimental Investigations ◽  
Clinical Investigations ◽  
Prolonged Duration ◽  
High Doses ◽  
Long Acting

ABSTRACT A description is given of experimental investigations and preliminary clinical experience with the long-acting oestriol compound polyoestriol phosphate – a water-soluble polymere of oestriol and phosphoric acid. The compound seems to exert all the physiologically important effects of oestriol. Even with high doses the hormone causes no proliferation of the endometrium and no withdrawal bleeding. It has no untoward effect on metabolism. It decreases slightly the cholesterol concentration (to the extent of ⅓–⅕ of the effect produced by long-acting oestradiol esters). The compound has a wide therapeutic range. No side-effects have been observed. Doses of 10 mg or more have a prolonged duration. Additional prolongation of the effect is largely dependent on dosage. To ensure an effect lasting for 4 weeks 40 mg polyoestriol phosphate (corresponding with 30 mg oestriol) is required – an amount which roughly corresponds with physiological quantitative data. The compound, which involves an interesting new principle of prolongation, was most effectively used in the treatment of menopausal symptoms and genital organic disorders. For these indications it can be recommended without reservation.

EINE CHEMISCHE METHODE ZUR BESTIMMUNG VON 16-EPI-ÖSTRIOL IM URIN DES MENSCHEN

1963 ◽  
Vol 44 (1) ◽  
pp. 47-66 ◽  
Author(s):  
W. Nocke ◽  
H. Breuer
Keyword(s):  
Melting Point ◽  
Phosphoric Acid ◽  
Aqueous Alkali ◽  
Percentage Error ◽  
Organic Layer ◽  
Maximum Percentage ◽  
Chemical Determination ◽  
Routine Assay ◽  
Hydrolysis Of

ABSTRACT A method for the chemical determination of 16-epi-oestriol in the urine of nonpregnant women with a qualitative sensitivity of less than 0.5 μg/24 h is described. The separation of 16-epi-oestriol and oestriol is accomplished by converting 16-epi-oestriol into its acetonide, a reaction which is stereoselective for cis-glycols and therefore not undergone by oestriol as a trans-glycol. Following partition between chloroform and aqueous alkali, the acetonide of 16-epi-oestriol is completely separated with the organic layer whereas oestriol as a strong phenol remains in the alkaline phase. 16-epi-oestriol is chromatographed on alumina as the acetonide and determined as a Kober chromogen. This procedure can easily be incorporated into the method of Brown et al. (1957 b) thus making possible the simultaneous routine assay of oestradiol-17β, oestrone, oestriol and 16-epi-oestriol from one sample of urine. The specificity of the method was established by separation of 16-epi-oestriol from nonpregnancy urine as the acetonide, hydrolysis of the acetonide by phosphoric acid, isolation of the free compound by microsublimation and identification by micro melting point, colour reactions and chromatography. The accuracy of the method is given by a mean recovery of 64% for pure crystalline 16-epi-oestriol when added to hydrolysed urine in 5–10 μg amounts. The precision is given by s = 0.24 μg/24 h. For the duplicate determination of 16-epi-oestriol the qualitative sensitivity is 0.44 μg/24 h, the maximum percentage error being ± 100% The quantitative sensitivity (±25% error) is 1.7 μg/24 h.

The presence of new peptides containing D-ribulose and phosphoric acid in germ cells

Reproduction ◽  
1969 ◽  
Vol 18 (1) ◽  
pp. 160-160 ◽  
Author(s):  
H Amand ◽  
I Yanagisawa ◽  
T Asada
Keyword(s):  
Phosphoric Acid ◽  
Germ Cells
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