Nanoscale Optical Patterning of Amorphous Silicon Carbide for High-Density Data Archiving

Multilayer Thin Films - Versatile Applications for Materials Engineering ◽

10.5772/intechopen.88750 ◽

2020 ◽

Author(s):

Tania Tsvetkova

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

High Density ◽

Density Data ◽

Amorphous Silicon Carbide ◽

Data Archiving ◽

Optical Patterning

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High-rate, room-temperature synthesis of amorphous silicon carbide films from organo-silicon in high-density helicon wave plasma

Vacuum ◽

10.1016/j.vacuum.2019.03.004 ◽

2019 ◽

Vol 164 ◽

pp. 355-360 ◽

Author(s):

Xiao Ma ◽

Dongsheng Xu ◽

Peiyu Ji ◽

Chenggang Jin ◽

James Lin ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Room Temperature ◽

High Density ◽

High Rate ◽

Temperature Synthesis ◽

Amorphous Silicon Carbide ◽

Room Temperature Synthesis ◽

Helicon Wave ◽

Helicon Wave Plasma

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Structural relaxation of amorphous silicon carbide thin films in thermal annealing

Thin Solid Films ◽

10.1016/j.tsf.2007.06.194 ◽

2008 ◽

Vol 516 (12) ◽

pp. 3855-3861 ◽

Author(s):

Kun Xue ◽

Li-Sha Niu ◽

Hui-Ji Shi ◽

Jiwen Liu

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Structural Relaxation ◽

Amorphous Silicon Carbide

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Characterization of hydrogenated amorphous silicon carbide films

10.1117/12.57018 ◽

1992 ◽

Author(s):

S. Uthanna

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Photoelectron yield spectroscopy and inverse photoemission spectroscopy evaluations of p-type amorphous silicon carbide films prepared using liquid materials

AIP Advances ◽

10.1063/1.4952592 ◽

2016 ◽

Vol 6 (5) ◽

pp. 055021 ◽

Author(s):

Tatsuya Murakami ◽

Takashi Masuda ◽

Satoshi Inoue ◽

Hiroshi Yano ◽

Noriyuki Iwamuro ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Photoemission Spectroscopy ◽

Amorphous Silicon Carbide ◽

Inverse Photoemission ◽

P Type ◽

Inverse Photoemission Spectroscopy

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Ion beam effects on the hydrogenated bonds of amorphous silicon carbide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)01176-3 ◽

2000 ◽

Vol 166-167 ◽

pp. 404-409 ◽

Author(s):

P. Musumeci ◽

L. Calcagno ◽

A. Makhtari ◽

P. Baeri ◽

G. Compagnini ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Ion Beam ◽

Amorphous Silicon Carbide

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Hydrogenated Amorphous Silicon Carbide Alternating-Current Thin-Film Light-Emitting Diodes

Journal of The Electrochemical Society ◽

10.1149/1.2742806 ◽

2007 ◽

Vol 154 (8) ◽

pp. H687

Author(s):

Rong-Hwei Yeh ◽

Ginn-Horng Chen ◽

Shih-Yung Lo ◽

Jyh-Wong Hong

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Light Emitting Diodes ◽

Hydrogenated Amorphous Silicon ◽

Alternating Current ◽

Amorphous Silicon Carbide ◽

Light Emitting ◽

Hydrogenated Amorphous

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Temperature dependence of irradiation-induced nanocrystallization in amorphous silicon carbide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2021.09.011 ◽

2021 ◽

Vol 507 ◽

pp. 1-6

Author(s):

Limin Zhang ◽

Weilin Jiang ◽

Shenghong Wang ◽

Tamas Varga ◽

Chenglong Pan ◽

...

Keyword(s):

Silicon Carbide ◽

Temperature Dependence ◽

Amorphous Silicon ◽

Amorphous Silicon Carbide

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Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(83)90643-9 ◽

1983 ◽

Vol 59-60 ◽

pp. 553-556 ◽

Author(s):

S. Nitta ◽

A. Hatano ◽

M. Yamada ◽

M. Watanabe ◽

M. Kawai

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrocarbon Gas ◽

Hydrogenated Amorphous

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Crystalline silicon surface passivation by amorphous silicon carbide films

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2006.08.004 ◽

2007 ◽

Vol 91 (2-3) ◽

pp. 174-179 ◽

Author(s):

M. Vetter ◽

I. Martín ◽

R. Ferre ◽

M. Garín ◽

R. Alcubilla

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Amorphous Silicon Carbide ◽

Silicon Surface Passivation

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Investigation of hydrogen plasma treatment for reducing defects in silicon quantum dot superlattice structure with amorphous silicon carbide matrix

Nanoscale Research Letters ◽

10.1186/1556-276x-9-72 ◽

2014 ◽

Vol 9 (1) ◽

Author(s):

Shigeru Yamada ◽

Yasuyoshi Kurokawa ◽

Shinsuke Miyajima ◽

Makoto Konagai

Keyword(s):

Silicon Carbide ◽

Quantum Dot ◽

Plasma Treatment ◽

Amorphous Silicon ◽

Hydrogen Plasma ◽

Amorphous Silicon Carbide ◽

Superlattice Structure ◽

Silicon Quantum Dot ◽

Carbide Matrix ◽

Silicon Carbide Matrix

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