An evaluation method of the profile of plasma-induced defects based on capacitance–voltage measurement
2012 ◽
Vol 33
(7)
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pp. 1015-1017
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Keyword(s):
2019 ◽
Vol 686
(1)
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pp. 92-98
Keyword(s):
2014 ◽
Vol 59
(8)
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pp. 747-753
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Keyword(s):
1998 ◽
Vol 16
(1)
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pp. 457
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2011 ◽
Vol 687
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pp. 303-308
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