High Velocity and High Coupling Surface Acoustic Waves Using ZnO Films on Ceramic Substrates with High Acoustic Velocity

1985 ◽  
Vol 24 (S1) ◽  
pp. 124 ◽  
Author(s):  
Fumio Takeda ◽  
Tadashi Shiosaki ◽  
Akira Kawabata
Author(s):  
Masashi Suzuki ◽  
Shoji Kakio

Abstract Piezoelectricity of YbAlN films has recently been shown to be almost as high as that of ScAlN films. YbAlN film surface acoustic wave (SAW) resonators are expected to have a high coupling factor. We theoretically investigated the propagation characteristics of first-mode Rayleigh SAWs (RSAWs) on Yb0.33Al0.67N film/high-velocity Si, sapphire, AlN, SiC, BN, and diamond substrates. The first-mode RSAWs on the YbAlN layered structures had high coupling factors, higher than those on ScAlN layered structures. An enhancement of the effective coupling factor of the first mode RSAWs was observed in polarity inverted YbAlN film/BN or diamond substrate structures.


Author(s):  
Yan Wang ◽  
Shu-yi Zhang ◽  
Li Fan ◽  
Xiu-ji Shui ◽  
Zhong-ning Zhang ◽  
...  

Author(s):  
G. Carlotti ◽  
D. Fioretto ◽  
G. Socino ◽  
L. Palmieri ◽  
A. Petri ◽  
...  

Materials ◽  
2021 ◽  
Vol 14 (16) ◽  
pp. 4648
Author(s):  
Maurice Gonon ◽  
Florian Dupla ◽  
Hassan Alhousseini ◽  
Marc Duquennoy ◽  
Nikolay Smagin ◽  
...  

Because of their characteristics, including a d33 of 10–15 pC/N and high stability up to temperatures over 1000 °C, polar glass–ceramics containing fresnoite crystals can be regarded as highly effective materials for applications requiring piezoelectricity at high temperatures. In the present paper we investigate barium substitutions in an Sr-fresnoite (STS) glass–ceramic. Two aspects are studied: first, the effect of the substitution on the preferential orientation of the crystallization, and second, the ability of the glass–ceramics to generate and propagate surface acoustic waves (SAW) at high temperatures. XRD analyses show that a 10 at.% substitution of Ba allows us to keep a strong preferential orientation of the (00l) planes of the fresnoite crystals down to more than 1 mm below the surfaces. Higher substitution levels (25 and 50 at.%), induce a non-oriented volume crystallization mechanism that competes with the surface mechanism. SAW devices were fabricated from glass–ceramic substrates with 0, 10 and 25 at.% Ba substitutions. Temperature testing reveals the high stability of the frequency and delay for all of these devices. The glass–ceramic with a 10 at.% Ba substitution gives the strongest amplitude of the SAW signal. This is attributed to the high (00l) preferential orientation and the absence of disoriented volume crystallization.


2017 ◽  
Vol 56 (7S1) ◽  
pp. 07JD13 ◽  
Author(s):  
Masashi Gomi ◽  
Takuya Kataoka ◽  
Junki Hayashi ◽  
Shoji Kakio

2003 ◽  
Vol 18 (3) ◽  
pp. 545-548 ◽  
Author(s):  
Parmanand Sharma ◽  
Sanjeev Kumar ◽  
K. Sreenivas

The frequency response of a 37 MHz bulk LiNbO3 surface acoustic wave (SAW) filter with a 200-nm-thick ZnO overlayer exhibited a downshift in the frequency with ultraviolet (UV) light due to acoustoelectric interactions between the photo-generated carriers in the semiconducting ZnO and the surface acoustic waves. In contrast, a 36 MHz ZnO thin film SAW delay-line with insulating ZnO films exhibited an upshift in the frequency. The response was more pronounced at higher harmonics (130–315 MHz) and was attributed to changes in the elastic/dielectric properties in the upper surface layer of ZnO. A linear change in the frequency with UV intensity shows immense applicability for wireless ultraviolet sensor applications.


2003 ◽  
Vol 785 ◽  
Author(s):  
Farid Hassani ◽  
Shahrokh Ahmadi ◽  
Can E. Korman ◽  
Mona Zaghloul ◽  
Shiva Hullavarad ◽  
...  

AbstractZnO, a well-known piezoelectric material, is used to develop micro-scale Surface Acoustic Wave (SAW) delay line sensor. In this work, SAW delay line Devices are fabricated employing ZnO films that are deposited by RF sputtering technique. Films are characterized prior to device fabrication by X-Ray Diffraction (XRD) for film crystalline quality, UV-visible transmission spectroscopy for optical characteristics, and Atomic Force Microscopy (AFM) for surface morphology. Interdigital electrodes producing surface acoustic waves in the hundreds of MHz are developed by photolithography and metalization techniques. SAW delay line device testing, measurement and characteristics on RF sputtered ZnO films are presented and compared.


2000 ◽  
Vol 10 (04) ◽  
pp. 1069-1109 ◽  
Author(s):  
MAURICIO PEREIRA DA CUNHA

This article discusses the characteristics of pseudo surface waves (PSAWs) and high velocity pseudo surface waves (HVPSAWs). The fundamental properties of these waves, the matrix method formulation, the different solution types due to crystal symmetry, early experiments on HVPSAWs, and practical applications of pseudo surface acoustic waves serve as an introduction. The solutions to the pseudo modes are discussed by analyzing the boundary condition function for several orientations. The relation between the radiating partial modes and the sagittal plane bulk slowness reveals new characteristics of the different symmetry types of HVPSAW, and helps classify and understand the pseudo modes. The acoustoelectric Poynting vector is used along different crystal symmetry orientations to reveal and discuss the pseudo SAW characteristics: penetration depth, declination of the power vector, and an estimation of power flow angle. Experimental data and numerical solutions of HVPSAW and PSAW along selected planes and orientations are discussed. This article concludes with a brief analysis of layered structures on different symmetry type substrates and a discussion of the layered pseudo surface wave properties.


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