High Coupling and High Velocity Surface Acoustic Waves Using C-Axis Oriented ZnO Films on Translucent Al2O3Ceramics

1983 ◽  
Author(s):  
T. Shiosaki ◽  
F. Takeda ◽  
A. Kawabata
Keyword(s):  
High Velocity ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Zno Films ◽  
Velocity Surface

Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb0.33Al0.67N piezoelectric films/high-velocity substrates

2022 ◽  
Author(s):  
Masashi Suzuki ◽  
Shoji Kakio
Keyword(s):  
High Velocity ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Film Surface ◽  
Layered Structures ◽  
Coupling Factor ◽  
Propagation Characteristics ◽  
Effective Coupling ◽  
Diamond Substrate ◽  
Coupling Factors

Abstract Piezoelectricity of YbAlN films has recently been shown to be almost as high as that of ScAlN films. YbAlN film surface acoustic wave (SAW) resonators are expected to have a high coupling factor. We theoretically investigated the propagation characteristics of first-mode Rayleigh SAWs (RSAWs) on Yb0.33Al0.67N film/high-velocity Si, sapphire, AlN, SiC, BN, and diamond substrates. The first-mode RSAWs on the YbAlN layered structures had high coupling factors, higher than those on ScAlN layered structures. An enhancement of the effective coupling factor of the first mode RSAWs was observed in polarity inverted YbAlN film/BN or diamond substrate structures.

Characteristics of surface acoustic waves excited by (1120) zno films deposited on R-sapphire substrates

2013 ◽  
Vol 60 (6) ◽  
pp. 1213-1218 ◽  
Author(s):  
Yan Wang ◽  
Shu-yi Zhang ◽  
Li Fan ◽  
Xiu-ji Shui ◽  
Zhong-ning Zhang ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Zno Films ◽  
Sapphire Substrates

Surface acoustic waves in c-axis inclined ZnO films

2002 ◽  
Author(s):  
G. Carlotti ◽  
D. Fioretto ◽  
G. Socino ◽  
L. Palmieri ◽  
A. Petri ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Zno Films

High-coupling leaky surface acoustic waves on LiNbO3or LiTaO3thin plate bonded to high-velocity substrate

2017 ◽  
Vol 56 (7S1) ◽  
pp. 07JD13 ◽  
Author(s):  
Masashi Gomi ◽  
Takuya Kataoka ◽  
Junki Hayashi ◽  
Shoji Kakio
Keyword(s):  
High Velocity ◽  
Acoustic Waves ◽  
Surface Acoustic Waves

Interaction of surface acoustic waves and ultraviolet light in ZnO films

2003 ◽  
Vol 18 (3) ◽  
pp. 545-548 ◽  
Author(s):  
Parmanand Sharma ◽  
Sanjeev Kumar ◽  
K. Sreenivas
Keyword(s):  
Acoustic Waves ◽  
Delay Line ◽  
Uv Light ◽  
Surface Acoustic Waves ◽  
Zno Films ◽  
Zno Thin Film ◽  
Linear Change ◽  
Sensor Applications ◽  
Upper Surface Layer ◽  
Ultraviolet Sensor

The frequency response of a 37 MHz bulk LiNbO3 surface acoustic wave (SAW) filter with a 200-nm-thick ZnO overlayer exhibited a downshift in the frequency with ultraviolet (UV) light due to acoustoelectric interactions between the photo-generated carriers in the semiconducting ZnO and the surface acoustic waves. In contrast, a 36 MHz ZnO thin film SAW delay-line with insulating ZnO films exhibited an upshift in the frequency. The response was more pronounced at higher harmonics (130–315 MHz) and was attributed to changes in the elastic/dielectric properties in the upper surface layer of ZnO. A linear change in the frequency with UV intensity shows immense applicability for wireless ultraviolet sensor applications.

ZnO Based SAW Delay Line: Thin Film Characteristics and IDT Fabrication

2003 ◽  
Vol 785 ◽  
Author(s):  
Farid Hassani ◽  
Shahrokh Ahmadi ◽  
Can E. Korman ◽  
Mona Zaghloul ◽  
Shiva Hullavarad ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Delay Line ◽  
Surface Acoustic Waves ◽  
Rf Sputtering ◽  
Device Fabrication ◽  
Zno Films ◽  
X Ray Diffraction ◽  
Force Microscopy ◽  
Atomic Force ◽  
Interdigital Electrodes

AbstractZnO, a well-known piezoelectric material, is used to develop micro-scale Surface Acoustic Wave (SAW) delay line sensor. In this work, SAW delay line Devices are fabricated employing ZnO films that are deposited by RF sputtering technique. Films are characterized prior to device fabrication by X-Ray Diffraction (XRD) for film crystalline quality, UV-visible transmission spectroscopy for optical characteristics, and Atomic Force Microscopy (AFM) for surface morphology. Interdigital electrodes producing surface acoustic waves in the hundreds of MHz are developed by photolithography and metalization techniques. SAW delay line device testing, measurement and characteristics on RF sputtered ZnO films are presented and compared.

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