Inner Spacer Engineering to Improve Mechanical Stability in Channel-Release Process of Nanosheet FETs

Mechanical stress is demonstrated in the fabrication process of nanosheet FETs. In particular, unwanted mechanical instability stemming from gravity during channel-release is covered in detail by aid of 3-D simulations. The simulation results show the physical weakness of suspended nanosheets and the impact of nanosheet thickness. Inner spacer engineering based on geometry and elastic property are suggested for better mechanical stability. The formation of wide contact area between inner spacer and nanosheet, as well as applying rigid spacer dielectric material, are preferred.

Surface and thermal properties of synthesized cationic poly(ethylene oxide) gemini surfactants: the role of the spacer

Synthesis of new cationic poly(ethylene oxide) gemini surfactants containing flexible and rigid spacer groups to tolerate harsh reservoir condition.

Bis[alkynylplatinum(ii)] terpyridine molecular tweezer with conformationally-rigid spacer: modulating the binding selectivity in a three-component supramolecular recognition system

Modulation of binding selectivity in a three-component molecular tweezer/guest recognition system.

Synthesis, physiochemical property and antibacterial activity of gemini quaternary ammonium salts with a rigid spacer

Aggregate morphologies of GQASs change from vesicles and micelles to network aggregates and then to globular vesicles with increase of concentration.

Efficient synthesis of phenylene-ethynylene rods and their use as rigid spacers in divalent inhibitors

The synthesis of phenylene-ethynylene rods and their use as rigid spacers is described. Alternation of a Sonogashira reaction and silyl group cleavage was used to obtain rigid spacers with even and odd numbers of phenylene units. Preliminary applications of these rods in divalent systems are shown. Inhibition studies with Pseudomonas Aeruginosa lectin LecA showed that the rigid spacer proved greatly beneficial for the inhibitory potency.