ceria particle
Recently Published Documents


TOTAL DOCUMENTS

16
(FIVE YEARS 1)

H-INDEX

5
(FIVE YEARS 0)

2021 ◽  
Vol 314 ◽  
pp. 247-252
Author(s):  
Juhwan Kim ◽  
Seokjun Hong ◽  
Chulwoo Bae ◽  
Yutaka Wada ◽  
Hirokuni Hiyama ◽  
...  

In chemical mechanical planarization (CMP) processes, ceria is generally used as the abrasive . After the CMP process, many ceria particles adhere to the wafer surface and must be removed prior to subsequent processing. In this study, the effect of varied viscosity was investigated during the buffing CMP process for ceria particle removal. After contaminating the wafer surface with ceria slurry, the ceria particles were removed through the buffing CMP process. The wafer surface was analyzed through inductively coupled plasma mass spectrometry (ICP-MS) to confirm cleaning efficiency. The ICP-MS data showed that, as buffing CMP solution viscosity increased, cleaning efficiency improved. These results suggest that increasing the viscosity of the buffing CMP solution improves its effectiveness in removing ceria particles.



2019 ◽  
Vol 18 (1) ◽  
pp. 559-564 ◽  
Author(s):  
Zefang Zhang ◽  
Weili Liu ◽  
Zhi-Tang Song ◽  
Xiaokai Hu


2019 ◽  
Vol 33 (1) ◽  
pp. 63-77 ◽  
Author(s):  
Roman Bader ◽  
Lukas Gampp ◽  
Tristan Breuillé ◽  
Sophia Haussener ◽  
Aldo Steinfeld ◽  
...  


2018 ◽  
Vol 3 (1) ◽  
pp. 75-85 ◽  
Author(s):  
Gregory M. Mullen ◽  
Edward J. Evans ◽  
Benjamin C. Siegert ◽  
Nathan R. Miller ◽  
Benjamin K. Rosselet ◽  
...  

The size of ceria particles influenced the activity of Au/CeO2 catalysts for ethanol oxidation, demonstrating a linear correlation between oxygen storage capacity and catalytic activity.



Solar Energy ◽  
2017 ◽  
Vol 158 ◽  
pp. 737-745 ◽  
Author(s):  
Johannes Grobbel ◽  
Stefan Brendelberger ◽  
Christian Sattler ◽  
Robert Pitz-Paal


2017 ◽  
Vol 78 (1) ◽  
pp. 1149-1159 ◽  
Author(s):  
Kazuki Miyahara ◽  
Anna Sciazko ◽  
Takaaki Shimura ◽  
Zhenjun Jiao ◽  
Naoki Shikazono






Sign in / Sign up

Export Citation Format

Share Document