Characterization of the deposition behavior and changes in bonding structures of hexamethyldisiloxane and decamethylcyclopentasiloxane atmospheric plasma‐deposited films*
2007 ◽
Vol 4
(S1)
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pp. S784-S789
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2011 ◽
Vol 485
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pp. 133-136
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2018 ◽
Vol 38
(2)
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pp. 379-395
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Keyword(s):
2004 ◽
Vol 187
(2-3)
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pp. 185-193
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Keyword(s):
2018 ◽
Vol 740
◽
pp. 610-616
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