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Yoshikazu Hirai ◽  
Toshiyuki Tsuchiya
Keyword(s):  
Single Crystal ◽  
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Single Crystal Silicon ◽  
Crystal Silicon ◽  
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2016 ◽  
Vol 163 ◽  
pp. 523-532 ◽  
Author(s):  
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Kenji Miyamoto ◽  
Koji Sugano ◽  
Osamu Tabata
Keyword(s):  
Single Crystal ◽  
Oxide Layer ◽  
Fracture Behavior ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
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Ryota YANAGIDA ◽  
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Fracture Toughness ◽  
Single Crystal ◽  
Fracture Behavior ◽  
Single Crystal Silicon ◽  
Silicon Wafers ◽  
Crystal Silicon
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