Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces

2012 ◽  
Vol 22 (2) ◽  
pp. 025008 ◽  
Author(s):  
N Ansari ◽  
W R Ashurst
1993 ◽  
Vol 8 (7) ◽  
pp. 1611-1628 ◽  
Author(s):  
Bharat Bhushan ◽  
Sreekanth Venkatesan

Silicon is an attractive material for the construction of read/write head sliders in magnetic recording applications from the viewpoints of ease of miniaturization and low fabrication cost. In the present investigation we have studied the friction and wear behavior of single-crystal, polycrystalline, ion-implanted, thermally oxidized (wet and dry), and plasma-enhanced chemical vapor deposition (PECVD) oxide-coated silicon pins while sliding against lubricated and unlubricated thin-film disks. For comparison, tests have also been conducted with Al2O3–TiC and Mn–Zn ferrite pins which are currently used as slider materials. With single-crystal silicon the rise in the coefficient of friction with sliding cycles is faster compared to Al2O3–TiC and Mn–Zn ferrite pins. In each case, the rise in friction is associated with the burnishing of the disk surface and transfer of amorphous carbon and lubricant (in the case of lubricated disks) from the disk to the pin. Thermally oxidized (under dry oxygen conditions) single-crystal silicon and PECVD oxide-coated single-crystal silicon exhibit excellent tribological characteristics while sliding against lubricated disks, and we believe this is attributable to the chemical passivity of the oxide coating. In dry nitrogen, the coefficient of friction for single-crystal silicon sliding against lubricated disks behaves differently than in air, decreasing from an initial value of 0.2 to less than 0.05 within 5000 cycles of sliding. We believe that silicon/thin-film disk interface friction and wear is governed by the uniformity and tenacity of the amorphous carbon transfer film and oxygen-enhanced fracture of silicon.


1991 ◽  
Vol 26 (6) ◽  
pp. 1505-1511 ◽  
Author(s):  
D. -S. Park ◽  
S. Danyluk ◽  
M. J. McNallan

RSC Advances ◽  
2018 ◽  
Vol 8 (10) ◽  
pp. 5596-5607 ◽  
Author(s):  
Yuwei Ye ◽  
Zhiyong Liu ◽  
Wei Liu ◽  
Dawei Zhang ◽  
Yongxin Wang ◽  
...  

In this paper, CrAlSiN coatings with different interlayers (without interlayer, Cr interlayer, CrN interlayer and Cr/CrN interlayer) were successfully obtained on 316L stainless steel and single crystal silicon by multi-arc ion plating technique.


1981 ◽  
Vol 103 (2) ◽  
pp. 180-187 ◽  
Author(s):  
Kazuhisa Miyoshi ◽  
D. H. Buckley

Sliding friction experiments were conducted with various iron-base alloys (alloying elements were Ti, Cr, Mn, Ni, Rh, and W) in contact with a single-crystal silicon carbide (0001) surface in vacuum. Results indicate atomic size misfit and concentration of alloying elements play a dominant role in controlling adhesion, friction, and wear properties of iron-base binary alloys. The controlling mechanism of the alloy properties is as an intrinsic effect involving the resistance to shear fracture of cohesive bonding in the alloy. The coefficient of friction generally increases with an increase in solute concentration. The coefficient of friction increases as the solute-to-iron atomic radius ratio increases or decreases from unity. Alloys having higher solute concentration produce more transfer to silicon carbide than do alloys having low solute concentrations. The chemical activity of the alloying element is also an important parameter in controlling adhesion and friction of alloys.


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