Strain effect in single-crystal silicon-based multilayer surface acoustic wave structures
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2012 ◽
Vol 2012.20
(0)
◽
pp. 5-6
2012 ◽
Vol 22
(2)
◽
pp. 025008
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1995 ◽
Vol 47
(1-3)
◽
pp. 623-627
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