Fabrication of Thin-Film Microlens Arrays by Mask-Shaded Vacuum Deposition

1997 ◽  
pp. 169-177
Author(s):  
R. Grunwald ◽  
S. Woggon ◽  
R. Ehlert
Keyword(s):  
Thin Film ◽  
Vacuum Deposition ◽  
Microlens Arrays

Thin-film microlens arrays with non-spherical elements

1997 ◽  
Vol 6 (6) ◽  
pp. 663-671 ◽  
Author(s):  
R Grunwald ◽  
S Woggon ◽  
R Ehlert ◽  
W Reinecke
Keyword(s):  
Thin Film ◽  
Microlens Arrays ◽  
Spherical Elements

Dependence of Resistivity on Thickness of Vacuum Deposited Copper Thin Films

2020 ◽  
Vol 12 (8) ◽  
pp. 1125-1129
Author(s):  
Shrutidhara Sarma
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Film Thickness ◽  
Empirical Relationship ◽  
Temperature Sensors ◽  
Vacuum Deposition ◽  
Deposition Chamber ◽  
Probe Technique ◽  
Film Resistivity ◽  
Electrical Systems

In depth understanding of resistivity of metals is of utmost importance for optimizing circuit designs and electrical systems. In this study, we investigated the relation between film thickness (in the range of 25−350 nm) and film resistivity of Cu thin films, with respect to thin film temperature sensors. The films were deposited in a vacuum deposition chamber over pyrex substrates and the film resistances were measured using 4 point probe technique. The empirical relationship established by Lacy has been used along with our experimental results in order to calculate the constants relating the filmsubstrate compatibility, which influences the change of resistivity with thickness.

Formation of Semiconductive Thin Film of Polyacrylonitrile by Vacuum Deposition

1971 ◽  
Vol 10 (6) ◽  
pp. 817-818 ◽  
Author(s):  
Masakuni Suzuki ◽  
Yozo Tanaka ◽  
Seiichi Ito
Keyword(s):  
Thin Film ◽  
Vacuum Deposition
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