Optimization of the Deposition Condition for Improving the Ti Film Resistance of DRAM Products

2021 ◽  
pp. 527-542
Author(s):  
Yun-Wei Lin ◽  
Chia-Ming Lin
Keyword(s):  
Deposition Condition ◽  
Film Resistance

Fabrication of YMnO3 Films: New Candidate for Non-Volatile Memory Devices

1996 ◽  
Vol 433 ◽  
Author(s):  
Norifumi Fujimura ◽  
Tadashi Ishida ◽  
Takeshi Yoshimura ◽  
Taichiro Ito
Keyword(s):  
Nonvolatile Memory ◽  
Valence Electron ◽  
Bottom Electrode ◽  
Rf Magnetron Sputtering ◽  
Film Deposition ◽  
Deposition Condition ◽  
Memory Devices ◽  
Non Volatile Memory ◽  
Nonvolatile Memory Devices ◽  
First Time

AbstractWe have proposed ReMnO3 (Re:rare earth) thin films, as a new candidate for nonvolatile memory devices. In this paper, we try to fabricate (0001) oriented YMnO3 films on (111)MgO, (0001)ZnO:Al/(0001) sapphire and (111)Pt/(111)MgO using rf magnetron sputtering. We succeed in obtaining (0001) epitaxial YMnO3 films on (111) MgO and (0001)ZnO:Al/(0001)sapphire substrate, and polycrystalline films on (111)Pt/(1 11)MgO for the first time. Electrical property of the bottom electrode (ZnO:Al) changes with varying the deposition condition of YMnO3 films. However, we find an optimum deposition condition of ZnO:Al film such that it functions as a bottom electrode even after YMnO3 film deposition. The dielectric properties of the epitaxial and polycrystalline YMnO3 films are almost the same. The YMnO3 films show leaky electrical properties. This may be caused by a change in the valence electron of Mn from 3+.

scholarly journals Correlating capacity fade with film resistance loss in fast charging of lithium-ion battery

2021 ◽  
Vol 485 ◽  
pp. 229360
Author(s):  
Prashant Gargh ◽  
Abhishek Sarkar ◽  
Yu Hui Lui ◽  
Sheng Shen ◽  
Chao Hu ◽  
...  
Keyword(s):  
Lithium Ion Battery ◽  
Lithium Ion ◽  
Capacity Fade ◽  
Film Resistance ◽  
Fast Charging ◽  
Resistance Loss

Extending Cooling Tower thermal Performance Prediction Using a Liquid-Side Film Resistance Model

1991 ◽  
Vol 12 (3) ◽  
pp. 19-30 ◽  
Author(s):  
T. J. MARSEILLE ◽  
J. S. SCHLIESING ◽  
D. M. BELL ◽  
B. M. JOHNSON
Keyword(s):  
Thermal Performance ◽  
Performance Prediction ◽  
Cooling Tower ◽  
Film Resistance ◽  
Resistance Model

EFFECT OF SURFACE ROUGHNESS ON THE ADHESIVE AND TRIBOLOGICAL CHARACTERISTICS OF DLC COATING PREPARED ON Co-Cr-Mo ALLOY

2002 ◽  
Vol 16 (06n07) ◽  
pp. 952-957 ◽  
Author(s):  
D. Sheeja ◽  
B. K. Tay ◽  
H. M. Lam ◽  
S. K. Ng
Keyword(s):  
Surface Roughness ◽  
Life Span ◽  
Substrate Surface ◽  
Resistance Coefficient ◽  
Metal Alloy ◽  
Deposition Condition ◽  
Dlc Coatings ◽  
Dlc Coating ◽  
Short Life Span ◽  
Substrate Surface Roughness

The Co-Cr-Mo alloy is extensively used for tribological applications, including orthopaedic components in total joint replacements. High quality diamond-like carbon (DLC) coatings on metal/alloy substrates are of great interest as they are able to protect them from severe wear and thus prolong the life span of the component. Since the roughness of the metal/alloy varies depending on the applications, a study has been carried out to investigate the effect of substrate surface roughness on the microstructure, sliding life, wear-resistance, coefficient of friction, adhension and hardness of DLC coatings prepared on Co-Cr-Mo alloy substrates under the same deposition condition. The microstructure of the films studied using Raman spectroscopy suggests that the film prepared on a smoother surface contains slightly higher fraction of sp 3 bonded carbon atoms. The characterization using a pin-on-disk tribometer reveals that, the film prepared on the roughest sample (Ra ~ 0.06 μm) exhibits a very short life span of about 20 cycles compared to the film that is prepared on a relatively smoother surface (Ra ~ 0.02 μm), which exhibits a life span of about 340,000 cycles. In order to investigate the origin of this improved property of the DLC film on the smoother surface, adhesive strength and hardness of the films were studied by using a micro-scratch tester and a Nano-indenter, respectively. The results suggest that the film prepared on the smoother surface exhibits better adhesion (higher critical load) and relatively higher hardness.

CHARACTERIZATIONS OF THE CORE-SHELL STRUCTURED MgB2/CARBON FIBER SYNTHESIS BY RF-SPUTTERING AND THERMAL EVAPORATION

2010 ◽  
Vol 17 (02) ◽  
pp. 177-184 ◽  
Author(s):  
SUNG CHANG PARK ◽  
YEONG JIN LIM ◽  
TAE-KEUN LEE ◽  
CHEOL JIN KIM
Keyword(s):  
Carbon Fiber ◽  
Vapor Pressure ◽  
Deposition Rate ◽  
Thermal Evaporation ◽  
Rf Sputtering ◽  
Control Unit ◽  
Average Diameter ◽  
Second Phase ◽  
Deposition Condition ◽  
Superconducting Transition

MgB2 /carbon fibers have been synthesized by the combination of RF-sputtering of B and thermal evaporation of Mg , followed by co-evaporation. First, boron layer was deposited by RF-sputtering on the carbon fiber with average diameter of 7.1 μm. Later this coated layer of B was reacted with Mg vapor to transform into MgB2 . Since the MgB2 reaction proceed with Mg diffusion into the boron layer, Mg vapor pressure and the diffusion time had to be controlled precisely to secure the complete reaction. Also the deposition rate of each element was controlled separately to obtain stoichiometric MgB2 , since Mg was evaporated by thermal heating and B by sputtering system. The sintered B target was magnetron sputtered at the RF-power of ~200 W, which corresponded to the deposition rate of ~3.6 Å/s. With the deposition rate of B fixed, the vapor pressure of Mg was controlled by varying the temperature of tungsten boat with heating element control unit between 100 and 900°C. The MgB2 layers with the thickness of 200–950 nm could be obtained and occasionally MgO appeared as a second phase. Superconducting transition temperatures were measured around ~38 K depending on the deposition condition.

Super-Resolution Readout for Magneto-Optical Disk by Optimizing the Deposition Condition of Non-Magnetic Mask Layer

2001 ◽  
Vol 674 ◽  
Author(s):  
Takayuki Shima ◽  
Johoo Kim ◽  
Hiroshi Fuji ◽  
Nobufumi Atoda ◽  
Junji Tominaga
Keyword(s):  
Silver Oxide ◽  
Near Field ◽  
Numerical Aperture ◽  
Super Resolution ◽  
Laser Wavelength ◽  
Deposition Condition ◽  
Resolution Limit ◽  
Plasma Sputtering ◽  
Mask Layer ◽  
Disk Structure

ABSTRACTSuper-resolution near-field structure (Super-RENS) was prepared by a heliconwave-plasma sputtering method to improve the disk property that is combined with a magneto-optical (MO) recording disk. Antimony and silver-oxide mask layers were prepared by the method and refractive indices were measured. Recording and retrieving of signals beyond the resolution limit (<370 nm) were achieved for both mask cases. Attempts to optimize the disk structure were also made using a conventional sputtering method. The smallest mark size was around 200 nm and the highest carrier-to-noise ratio (CNR) was 30 dB for 300-nm mark and 22 dB for 250-nm, when using a laser wavelength of 780 nm and a numerical aperture of 0.53. We have found that there is a competing super-resolutional mechanism besides Super-RENS that appears when high readout laser power is applied. This mechanism played rather an important role at least in the mark-size range of 200-370 nm.

scholarly journals The Tribological and Chemical Properties of Ni-W Alloy Electrodeposition

2019 ◽  
Vol 26 (1) ◽  
pp. 145-149
Author(s):  
Mofeed A. Jaleel ◽  
Eilaf Z. Gurji
Keyword(s):  
Chemical Resistance ◽  
Low Carbon Steel ◽  
Chemical Properties ◽  
Solution Temperature ◽  
Major Influence ◽  
Deposition Condition ◽  
Low Carbon ◽  
Alloy Electrodeposition ◽  
Citrate Bath ◽  
And Chemical Properties

The Electrodeposition process has been used to substrate Ni-W alloy on low carbon steel by using ammonical citrate bath. The influence of deposition condition by variation of current density (0.04-0.2 A/cm2) and solution temperature (60-70 °C), on the mechanical and chemical properties such as (microhardness, wear resistance, residual stress and chemical resistance) was studied. Results show that the current efficiency has the major influence on the tungsten content in the alloys which reflected to the properties of the deposits.

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