Reactive Magnetron Sputtering of Indium Tin Oxide Thin Films: The Cross-Corner and Cross-Magnetron Effect
2008 ◽
pp. 337-366
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2006 ◽
Vol 252
(8)
◽
pp. 2647-2656
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2004 ◽
Vol 184
(2-3)
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pp. 188-193
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2005 ◽
2016 ◽
Vol 26
(4)
◽
pp. 889-894
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2011 ◽
Vol 509
(41)
◽
pp. 9758-9763
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