Annealing effects on properties of antimony tin oxide thin films deposited by RF reactive magnetron sputtering

2004 ◽  
Vol 184 (2-3) ◽  
pp. 188-193 ◽  
Author(s):  
Jow-Lay Huang ◽  
Yi Pan ◽  
Jia Yuan Chang ◽  
Bao-Shun Yau
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Annealing Effects ◽  
Antimony Tin Oxide

Structure and optical parameters of Eu doped tellurium oxide thin films prepared by reactive magnetron sputtering method

2019 ◽  
Vol 691 ◽  
pp. 137592 ◽  
Author(s):  
Marcin Łapiński ◽  
Michalina Walas ◽  
Anna Gapska ◽  
Dorota Kulik ◽  
Aneta Szmytke ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Optical Parameters ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Tellurium Oxide
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