Exotic properties shown by quantum well structures, typical structures of future electron devices, are sensitive to interface roughness. Extensive studies are, thus, focused on characterization of interface structures. Recent improvement in quantum wire fabrication technology demands for characterizing not only perpendicular-interfaces to the growth direction but also parallel-ones (sidewall-interfaces). Such sophistication needs innovation in two-dimensional and nondestructive characterization technology.In device structures, interfaces are generally located deep in bulk. STM which visualize surface atoms can not monitor such interface. It is, thus, difficult to two- dimensionally characterize the interfaces.Interface steps induce well width fluctuation, which modulates optical transition energy between ground subbands in conduction and valence bands. Thus, interface step structures can be characterized by luminescence spectroscopy. Cathodoluminescence basically meets demand for nondestructive characterization of interface structures in two dimensions.