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In situ study of thin film growth by internal stress measurement under ultrahigh vacuum conditions: Silver and copper under the influence of oxygen
Thin Solid Films
◽
10.1016/0040-6090(86)90303-2
◽
1986
◽
Vol 142
(1)
◽
pp. 65-76
◽
Cited By ~ 33
Author(s):
R. Abermann
◽
R. Koch
Keyword(s):
Thin Film
◽
Internal Stress
◽
Film Growth
◽
Stress Measurement
◽
Ultrahigh Vacuum
◽
Thin Film Growth
◽
In Situ Study
◽
Internal Stress Measurement
Download Full-text
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References
In-situ study of Ni–Ti thin film growth on a TiN intermediate layer by X-ray diffraction
Sensors and Actuators B Chemical
◽
10.1016/j.snb.2006.12.052
◽
2007
◽
Vol 126
(1)
◽
pp. 332-337
◽
Cited By ~ 7
Author(s):
R MARTINS
◽
N SCHELL
◽
R SILVA
◽
L PEREIRA
◽
K MAHESH
◽
...
Keyword(s):
Thin Film
◽
Intermediate Layer
◽
Film Growth
◽
Thin Film Growth
◽
X Ray Diffraction
◽
X Ray
◽
In Situ Study
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In situ study of a strontium β-diketonate precursor for thin-film growth by atomic layer epitaxy
Journal of Materials Chemistry
◽
10.1039/jm9940401239
◽
1994
◽
Vol 4
(8)
◽
pp. 1239-1244
◽
Cited By ~ 35
Author(s):
Jaan Aarik
◽
Aleks Aidla
◽
Andres Jaek
◽
Markku Leskelä
◽
Lauri Niinistö
Keyword(s):
Thin Film
◽
Film Growth
◽
Atomic Layer
◽
Thin Film Growth
◽
Atomic Layer Epitaxy
◽
In Situ Study
Download Full-text
An ultrahigh vacuum scanning tunneling microscope for in situ studies of thin-film growth
Review of Scientific Instruments
◽
10.1063/1.1147951
◽
1997
◽
Vol 68
(3)
◽
pp. 1455-1457
◽
Cited By ~ 10
Author(s):
Ch. Witt
◽
U. Mick
◽
M. Bode
◽
R. Wiesendanger
Keyword(s):
Thin Film
◽
Scanning Tunneling Microscope
◽
Film Growth
◽
Ultrahigh Vacuum
◽
Thin Film Growth
◽
Scanning Tunneling
◽
Tunneling Microscope
◽
In Situ Studies
Download Full-text
Resolving the Evolution of Atomic Layer-Deposited Thin-Film Growth by Continuous In Situ X-Ray Absorption Spectroscopy
Chemistry of Materials
◽
10.1021/acs.chemmater.0c04547
◽
2021
◽
Author(s):
Xiaohui Qu
◽
Danhua Yan
◽
Ruoshui Li
◽
Jiajie Cen
◽
Chenyu Zhou
◽
...
Keyword(s):
Thin Film
◽
Absorption Spectroscopy
◽
Film Growth
◽
Atomic Layer
◽
Thin Film Growth
◽
X Ray
◽
X Ray Absorption
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Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth
Review of Scientific Instruments
◽
10.1063/1.5042463
◽
2018
◽
Vol 89
(12)
◽
pp. 123702
◽
Cited By ~ 1
Author(s):
Kun Cao
◽
Quan Hu
◽
Jiaming Cai
◽
Miao Gong
◽
Jianfeng Yang
◽
...
Keyword(s):
Thin Film
◽
Atomic Layer Deposition
◽
Scanning Probe Microscopy
◽
Film Growth
◽
Atomic Layer
◽
Thin Film Growth
◽
Scanning Probe
◽
Probe Microscopy
◽
Layer Deposition
Download Full-text
In situ work function study of oxidation and thin film growth on clean surfaces
Surface Science
◽
10.1016/s0039-6028(99)00140-5
◽
1999
◽
Vol 433-435
◽
pp. 770-774
◽
Cited By ~ 16
Author(s):
I.D Baikie
◽
U Petermann
◽
B Lägel
Keyword(s):
Thin Film
◽
Work Function
◽
Film Growth
◽
Thin Film Growth
◽
Function Study
Download Full-text
In situ X-ray reflectivity measurement of thin film growth during vacuum deposition
Applied Surface Science
◽
10.1016/0169-4332(95)00242-1
◽
1996
◽
Vol 92
◽
pp. 282-286
◽
Cited By ~ 5
Author(s):
Chih-Hao Lee
◽
Sung-Yuh Tseng
Keyword(s):
Thin Film
◽
Film Growth
◽
Thin Film Growth
◽
Vacuum Deposition
◽
Reflectivity Measurement
◽
X Ray
Download Full-text
Inelastic scattering techniques for in situ characterization of thin film growth: backscatter Kikuchi diffraction
In Situ Characterization of Thin Film Growth
◽
10.1533/9780857094957.1.29
◽
2011
◽
pp. 29-51
Author(s):
N.J.C. Ingle
Keyword(s):
Thin Film
◽
Inelastic Scattering
◽
Film Growth
◽
Thin Film Growth
◽
In Situ Characterization
Download Full-text
Spectroscopies combined with reflection high-energy electron diffraction (RHEED) for real-time in situ surface monitoring of thin film growth
In Situ Characterization of Thin Film Growth
◽
10.1533/9780857094957.3.180
◽
2011
◽
pp. 180-211
◽
Cited By ~ 1
Author(s):
P.G. Staib
Keyword(s):
Thin Film
◽
Electron Diffraction
◽
Real Time
◽
Film Growth
◽
High Energy
◽
Thin Film Growth
◽
Energy Electron
◽
High Energy Electron
◽
Surface Monitoring
Download Full-text
Soft x-ray spectrometer for in situ monitoring of thin-film growth
10.1117/12.193191
◽
1994
◽
Cited By ~ 1
Author(s):
Per Skytt
◽
Carl J. Englund
◽
Nial Wassdahl
◽
Derrick C. Mancini
◽
Joseph Nordgren
Keyword(s):
Thin Film
◽
Film Growth
◽
Thin Film Growth
◽
In Situ Monitoring
◽
X Ray
Download Full-text
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