A mercury U-tube manometer with a high sensitivity throughout the pressure range from 0 to 800 torr.

Vacuum ◽  
1975 ◽  
Vol 25 (1) ◽  
pp. 38
Keyword(s):  
Pressure Range ◽  
High Sensitivity

High transparency flexible sensor for pressure and proximity sensing

2018 ◽  
Vol 32 (32) ◽  
pp. 1850394 ◽  
Author(s):  
Dan Bu ◽  
Si Qi Li ◽  
Yun Ming Sang ◽  
Cheng Jun Qiu
Keyword(s):  
Indium Tin Oxide ◽  
Pressure Range ◽  
Piecewise Linear ◽  
High Sensitivity ◽  
Maximum Error ◽  
Piecewise Linear Function ◽  
Good Repeatability ◽  
Flexible Pressure Sensor ◽  
Human Finger ◽  
Proximity Sensing

A high-sensitivity and high-transmittance flexible pressure sensor is presented in this paper. Using polydimethylsiloxane (PDMS) sensing film to cover indium tin oxide (ITO) electrodes interdigitated on the polyethylene terephthalate (PET) substrate, an interdigital capacitance (IDC) structure is constructed. The pressure and proximity sensing characteristics of the fabricated IDC sensor are investigated. The experiment results show that the IDC sensor has the piecewise linear function in different pressure range, especially sensitive to the low-pressure range with the pressure sensitivity of 6.64 kPa[Formula: see text]. Moreover, it has a good repeatability with the maximum error rate of 2.73% and a high transmittance over 90% in the wavelength range from 400 nm to 800 nm. As a human finger approaches or leaves, the proximity sensing characteristic emerges, with a maximum sensing distance of about 20 cm.

scholarly journals Highly-Sensitive Textile Pressure Sensors Enabled by Suspended-Type All Carbon Nanotube Fiber Transistor Architecture

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1103
Author(s):  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jun Ho Lee ◽  
Seung Beom Shin ◽  
Jeong Wan Jo ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Pressure Sensor ◽  
Pressure Range ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Low Pressure ◽  
Electronic Textiles ◽  
Carbon Nanotube Fiber ◽  
Cnt Fiber ◽  
Walled Carbon Nanotubes

Among various wearable health-monitoring electronics, electronic textiles (e-textiles) have been considered as an appropriate alternative for a convenient self-diagnosis approach. However, for the realization of the wearable e-textiles capable of detecting subtle human physiological signals, the low-sensing performances still remain as a challenge. In this study, a fiber transistor-type ultra-sensitive pressure sensor (FTPS) with a new architecture that is thread-like suspended dry-spun carbon nanotube (CNT) fiber source (S)/drain (D) electrodes is proposed as the first proof of concept for the detection of very low-pressure stimuli. As a result, the pressure sensor shows an ultra-high sensitivity of ~3050 Pa−1 and a response/recovery time of 258/114 ms in the very low-pressure range of <300 Pa as the fiber transistor was operated in the linear region (VDS = −0.1 V). Also, it was observed that the pressure-sensing characteristics are highly dependent on the contact pressure between the top CNT fiber S/D electrodes and the single-walled carbon nanotubes (SWCNTs) channel layer due to the air-gap made by the suspended S/D electrode fibers on the channel layers of fiber transistors. Furthermore, due to their remarkable sensitivity in the low-pressure range, an acoustic wave that has a very tiny pressure could be detected using the FTPS.

scholarly journals A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
He Tian ◽  
Yi Shu ◽  
Xue-Feng Wang ◽  
Mohammad Ali Mohammad ◽  
Zhi Bie ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
High Sensitivity ◽  
Wide Pressure Range ◽  
Wide Pressure

scholarly journals E-Skin Pressure Sensors Made by Laser Engraved PDMS Molds

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1039 ◽  
Author(s):  
Andreia dos Santos ◽  
Nuno Pinela ◽  
Pedro Alves ◽  
Rodrigo Santos ◽  
Elvira Fortunato ◽  
...  
Keyword(s):  
Pressure Wave ◽  
Pressure Range ◽  
Low Cost ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Wave Detection ◽  
Piezoresistive Sensors ◽  
Electronic Skin ◽  
Large Pressure ◽  
Skin Pressure

This work describes the production of electronic-skin (e-skin) piezoresistive sensors, which micro-structuration is performed using laser engraved molds. With this fabrication approach, low-cost sensors are easily produced with a tailored performance. Sensors with micro-cones and a high sensitivity of −1 kPa−1 under 600 Pa are more adequate for the blood pressure wave detection, while sensors micro-structured with semi-spheres and a maximum sensitivity of −6 × 10−3 kPa−1 in a large pressure range (1.6 kPa to 100 kPa) are more suitable for robotics and functional prosthesis.

scholarly journals Sea urchin-like microstructure pressure sensors with an ultra-broad range and high sensitivity

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Xiu-man Wang ◽  
Lu-qi Tao ◽  
Min Yuan ◽  
Ze-ping Wang ◽  
Jiabing Yu ◽  
...  
Keyword(s):  
Sea Urchin ◽  
Pressure Sensor ◽  
Pressure Range ◽  
Synergistic Effects ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Fast Response ◽  
Carbon Layer ◽  
Single Structure ◽  
Wide Pressure Range

AbstractSensitivity and pressure range are two significant parameters of pressure sensors. Existing pressure sensors have difficulty achieving both high sensitivity and a wide pressure range. Therefore, we propose a new pressure sensor with a ternary nanocomposite Fe2O3/C@SnO2. The sea urchin-like Fe2O3 structure promotes signal transduction and protects Fe2O3 needles from mechanical breaking, while the acetylene carbon black improves the conductivity of Fe2O3. Moreover, one part of the SnO2 nanoparticles adheres to the surfaces of Fe2O3 needles and forms Fe2O3/SnO2 heterostructures, while its other part disperses into the carbon layer to form SnO2@C structure. Collectively, the synergistic effects of the three structures (Fe2O3/C, Fe2O3/SnO2 and SnO2@C) improves on the limited pressure response range of a single structure. The experimental results demonstrate that the Fe2O3/C@SnO2 pressure sensor exhibits high sensitivity (680 kPa−1), fast response (10 ms), broad range (up to 150 kPa), and good reproducibility (over 3500 cycles under a pressure of 110 kPa), implying that the new pressure sensor has wide application prospects especially in wearable electronic devices and health monitoring.

Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Hamid Reza Ansari ◽  
Zoheir Kordrostami
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Pressure Range ◽  
High Sensitivity ◽  
Low Pressure ◽  
Air Gap ◽  
Capacitive Pressure Sensor ◽  
Aluminium Nitrate ◽  
Mems Sensor ◽  
Capacitive Mems

Abstract In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 µm × 150 µm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 µm. The proposed structure is an efficient sensor for the pressures in the range of 1–20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10−3 pF/kPa).

Multi‐Layered, Hierarchical Fabric‐Based Tactile Sensors with High Sensitivity and Linearity in Ultrawide Pressure Range

2019 ◽  
Vol 29 (35) ◽  
pp. 1902484 ◽  
Author(s):  
Soonjae Pyo ◽  
Jaeyong Lee ◽  
Wondo Kim ◽  
Eunhwan Jo ◽  
Jongbaeg Kim
Keyword(s):  
Pressure Range ◽  
High Sensitivity ◽  
Tactile Sensors
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