Origin of high carrier mobility and low residual stress in RF superimposed DC sputtered Al doped ZnO thin film for next generation flexible devices

2018 ◽  
Vol 436 ◽  
pp. 477-485 ◽  
Author(s):  
Naveen Kumar ◽  
Ashish Dubey ◽  
Behzad Bahrami ◽  
S. Venkatesan ◽  
Qiquan Qiao ◽  
...  
2018 ◽  
Vol 44 (10) ◽  
pp. 11751-11756 ◽  
Author(s):  
Li Jiang ◽  
Kang Huang ◽  
Jinhua Li ◽  
Shanshan Li ◽  
Yun Gao ◽  
...  

1990 ◽  
Vol 2 (12) ◽  
pp. 592-594 ◽  
Author(s):  
Francis Garnier ◽  
Gilles Horowitz ◽  
Xuezhou Peng ◽  
Denis Fichou

2017 ◽  
Vol 13 (5) ◽  
pp. 406-411 ◽  
Author(s):  
Sang Tae Kim ◽  
Yeonwoo Shin ◽  
Pil Sang Yun ◽  
Jong Uk Bae ◽  
In Jae Chung ◽  
...  

Nanoscale ◽  
2020 ◽  
Vol 12 (36) ◽  
pp. 18931-18937
Author(s):  
Wenhan Zhou ◽  
Shengli Zhang ◽  
Shiying Guo ◽  
Hengze Qu ◽  
Bo Cai ◽  
...  

2D materials with direct bandgaps and high carrier mobility are considered excellent candidates for next-generation electronic and optoelectronic devices.


2003 ◽  
Vol 769 ◽  
Author(s):  
I-Chun Cheng ◽  
Steven Allen ◽  
Sigurd Wagner

AbstractThin film transistors of nanocrystalline silicon (nc-Si:H) are made in the staggered topgate, bottom-source/drain geometry. To achieve both high carrier mobility and low off current, the nc-Si:H channel material must be kept thin but comprise a contiguous 10-nm thick crystalline layer at its top. We study this electrically most interesting top layer of the nc-Si:H channel film by AFM and SEM. Introducing an nc-Si:H seed layer underneath the TFT promotes the structural evolution of the nc-Si:H channel layer and raises the electron field effect mobility up to 40 cm2V-1s-1.


2015 ◽  
Vol 3 (28) ◽  
pp. 7513-7522 ◽  
Author(s):  
Ping-Yen Hsieh ◽  
Chi-Young Lee ◽  
Nyan-Hwa Tai

Flexible Si-TFTs with a high carrier mobility of 106 cm2 V−1 s−1 are fabricated using SiCl4/H2 microwave plasma for the preparation of crystalline Si films.


1998 ◽  
Vol 72 (3) ◽  
pp. 353-355 ◽  
Author(s):  
Hui Jin Looi ◽  
Richard B. Jackman ◽  
John S. Foord

2004 ◽  
Vol 828 ◽  
Author(s):  
Woosuck Shin ◽  
Kazuki Tajima ◽  
Yeongsoo Choi ◽  
Noriya Izu ◽  
Ichiro Matsubara ◽  
...  

ABSTRACTA gas sensor micro-device using both thermoelectric film and catalyst film has been developed on the platform of micro-hotplate. Thermoelectric thin film of B-doped SiGe was deposited on the Si3N4/SiO2/Si substrate by helicon sputtering method and thermal annealing was carried out to crystallize the as-deposited amorphous-like film. With increasing the annealing temperature and time, the crystallization of the SiGe thin film progressed, resulting in high carrier mobility and large absolute value of Seebeck coefficient. The hydrogen sensitivity of the micro-thermoelectric gas sensors was investigated.


2017 ◽  
Vol 7 (23) ◽  
pp. 5608-5613 ◽  
Author(s):  
Ning Wang ◽  
Min Liu ◽  
Junhui Liang ◽  
Tiantian Li ◽  
Hairen Tan ◽  
...  

Photovoltaic–photoelectrochemical (PV-PEC) water splitting based on silicon (Si) is very promising because of its broad visible light absorption, earth abundance and high carrier mobility.


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