Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition

2019 ◽  
Vol 463 ◽  
pp. 758-766 ◽  
Author(s):  
Iljo Kwak ◽  
Mahmut Kavrik ◽  
Jun Hong Park ◽  
Larry Grissom ◽  
Bernd Fruhberger ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
2D Materials ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Gate Oxides ◽  
Layer Deposition

scholarly journals Heteroepitaxy of La2O3 and La2–xYxO3 on GaAs (111)A by Atomic Layer Deposition: Achieving Low Interface Trap Density

Nano Letters ◽  
2013 ◽  
Vol 13 (2) ◽  
pp. 594-599 ◽  
Author(s):  
Xinwei Wang ◽  
Lin Dong ◽  
Jingyun Zhang ◽  
Yiqun Liu ◽  
Peide D. Ye ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Layer Deposition

Interface Trap Density Reduction for Al2O3/GaN (0001) Interfaces by Oxidizing Surface Preparation prior to Atomic Layer Deposition

2015 ◽  
Vol 7 (23) ◽  
pp. 12774-12780 ◽  
Author(s):  
Dmitry M. Zhernokletov ◽  
Muhammad A. Negara ◽  
Rathnait D. Long ◽  
Shaul Aloni ◽  
Dennis Nordlund ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Preparation ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Density Reduction ◽  
Layer Deposition

scholarly journals Van der Waals epitaxy of continuous thin films of 2D materials using atomic layer deposition in low temperature and low vacuum conditions

2D Materials ◽  
2019 ◽  
Vol 7 (1) ◽  
pp. 011003 ◽  
Author(s):  
Miika Mattinen ◽  
Peter J King ◽  
Georgi Popov ◽  
Jani Hämäläinen ◽  
Mikko J Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
2D Materials ◽  
Van Der Waals ◽  
Atomic Layer ◽  
Layer Deposition

Analyzing the interface trap density in SiGe capacitors using an abnormal flat band voltage shift at low temperature

2020 ◽  
Vol 13 (11) ◽  
pp. 111006
Author(s):  
Li-Chuan Sun ◽  
Chih-Yang Lin ◽  
Po-Hsun Chen ◽  
Tsung-Ming Tsai ◽  
Kuan-Ju Zhou ◽  
...  
Keyword(s):  
Low Temperature ◽  
Trap Density ◽  
Flat Band ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Flat Band Voltage ◽  
Voltage Shift

scholarly journals Low temperature temporal and spatial atomic layer deposition of TiO2 films

2015 ◽  
Vol 33 (4) ◽  
pp. 041512 ◽  
Author(s):  
Morteza Aghaee ◽  
Philipp S. Maydannik ◽  
Petri Johansson ◽  
Jurkka Kuusipalo ◽  
Mariadriana Creatore ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Layer Deposition ◽  
Temporal And Spatial
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