Moisture barrier properties of low-temperature atomic layer deposited Al2O3 using various oxidants

2019 ◽  
Vol 45 (15) ◽  
pp. 19105-19112 ◽  
Author(s):  
Taewook Nam ◽  
Haksoo Lee ◽  
Seunggi Seo ◽  
Sung Min Cho ◽  
Bonggeun Shong ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Moisture Barrier

Moisture Barrier Properties of Al2O3Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures

2013 ◽  
Vol 52 (3R) ◽  
pp. 035502 ◽  
Author(s):  
Hagyoung Choi ◽  
Sanghun Lee ◽  
Hyunsoo Jung ◽  
Seokyoon Shin ◽  
Giyul Ham ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Remote Plasma ◽  
Moisture Barrier ◽  
Layer Deposition

Highly-impermeable Al2O3/HfO2 moisture barrier films grown by low-temperature plasma-enhanced atomic layer deposition

2017 ◽  
Vol 50 ◽  
pp. 296-303 ◽  
Author(s):  
Lae Ho Kim ◽  
Jin Hyuk Jang ◽  
Yong Jin Jeong ◽  
Kyunghun Kim ◽  
Yonghwa Baek ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Moisture Barrier ◽  
Barrier Films ◽  
Layer Deposition

scholarly journals Low-temperature atomic layer deposition of Al2O3/alucone nanolaminates for OLED encapsulation

RSC Advances ◽  
2019 ◽  
Vol 9 (36) ◽  
pp. 20884-20891 ◽  
Author(s):  
Guixiong Chen ◽  
Yalian Weng ◽  
Fan Sun ◽  
Xiongtu Zhou ◽  
Chaoxing Wu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Molecular Layer ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Organic Light Emitting Diodes ◽  
Molecular Layer Deposition ◽  
Light Emitting ◽  
Organic Light ◽  
Layer Deposition

Al2O3/alucone laminates were fabricated by atomic layer deposition (ALD) and molecular layer deposition (MLD), showing good barrier properties. These laminates were found to prolong the lifetime of organic light-emitting diodes (OLEDs) evidently.

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