Mechanical properties of amorphous SiCN films deposited by ion-beam-assisted deposition

2021 ◽  
pp. 108732
Author(s):  
Ippei Tanaka ◽  
Shinichiro Matuoka ◽  
Yasunori Harada
Keyword(s):  
Mechanical Properties ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

STRUCTURES AND MECHANICAL PROPERTIES OF MODULATED ZrB2/W AND ZrB2/WNx NANOMULTILAYERS

2010 ◽  
Vol 24 (01n02) ◽  
pp. 34-42 ◽  
Author(s):  
M. TAN ◽  
D. J. LI ◽  
G. Q. LIU ◽  
L. DONG ◽  
X. Y. DENG ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Elastic Modulus ◽  
Significant Contribution ◽  
Layer Structure ◽  
Ion Beam ◽  
X Ray Diffraction ◽  
Cross Sectional ◽  
Composition Modulation ◽  
Ion Beam Assisted Deposition ◽  
Xrd Patterns

ZrB 2, W , WN x coatings and ZrB 2/ W , ZrB 2/ WN x multilayered coatings have been synthesized by ion beam assisted deposition at room temperature. X-ray diffraction (XRD), XP-2 surface profiler, scanning electron microscopy (SEM) and nano indenter were employed to investigate the influence of modulation periods and N + beam bombardment on microstructure and mechanical properties of the coatings. The low-angle XRD patterns and cross-sectional SEM indicate a well-defined composition modulation and layer structure of the multilayers. The multilayers with modulation periods ranging from 9 to 16 nm without N + bombardment possessed higher hardness and elastic modulus than the rule-of-mixtures value of monolithic ZrB 2 and W coatings. The highest hardness was 24 GPa. N + bombardment to growing multilayers gave a significant contribution to mechanical property enhancement. When modulation period is 9.6 nm, ZrB 2/ WN x multilayer with 200 eV N + bombardment reveals the highest hardness (30.2 GPa) and elastic modulus. This hardest multilayer also showed the improved residual stress and fracture resistance.

Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties

1997 ◽  
Vol 308-309 ◽  
pp. 239-244 ◽  
Author(s):  
M Kohzaki ◽  
A Matsumuro ◽  
T Hayashi ◽  
M Muramatsu ◽  
K Yamaguchi
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Mechanical Properties of Nanocomposite TiN/Si3N4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)

2003 ◽  
Vol 125 (2) ◽  
pp. 445-447 ◽  
Author(s):  
Chenhui Zhang ◽  
Jianbin Luo ◽  
Wenzhi Li ◽  
Darong Chen
Keyword(s):  
Mechanical Properties ◽  
Grain Size ◽  
Ion Beam ◽  
Nanocomposite Coatings ◽  
Ion Beam Assisted Deposition ◽  
Aisi 52100 ◽  
Aisi 52100 Steel ◽  
Nanoindentation Hardness ◽  
Si3n4 Film ◽  
Amorphous Si3n4

Nanocomposite coatings of TiN/Si3N4 have been prepared by ion beam assisted deposition (IBAD): simultaneous sputtering of Ti and Si targets and film bombardment by N2+ ions at 1000 eV. The Si/Ti ratio in the film varies from 0 to 0.9. The coatings are composed of amorphous Si3N4 and TiN nanocrystals with grain size of several nanometers. Such nanocomposites exhibit improved mechanical properties in comparison with TiN or Si3N4 deposited under the same conditions. The nanoindentation hardness of TiN/Si3N4 film at the Si/Ti ratio of 0.3 reaches a maximum of 42 GPa, compared with 22 GPa for TiN and 18 GPa for Si3N4. The wear resistance of AISI 52100 steel coated with these nanocomposite coatings is increased about three times.

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