Nano-indentation study on the mechanical properties of TiC/Mo multilayers deposited by ion beam assisted deposition

ZrB 2, W , WN x coatings and ZrB 2/ W , ZrB 2/ WN x multilayered coatings have been synthesized by ion beam assisted deposition at room temperature. X-ray diffraction (XRD), XP-2 surface profiler, scanning electron microscopy (SEM) and nano indenter were employed to investigate the influence of modulation periods and N + beam bombardment on microstructure and mechanical properties of the coatings. The low-angle XRD patterns and cross-sectional SEM indicate a well-defined composition modulation and layer structure of the multilayers. The multilayers with modulation periods ranging from 9 to 16 nm without N + bombardment possessed higher hardness and elastic modulus than the rule-of-mixtures value of monolithic ZrB 2 and W coatings. The highest hardness was 24 GPa. N + bombardment to growing multilayers gave a significant contribution to mechanical property enhancement. When modulation period is 9.6 nm, ZrB 2/ WN x multilayer with 200 eV N + bombardment reveals the highest hardness (30.2 GPa) and elastic modulus. This hardest multilayer also showed the improved residual stress and fracture resistance.

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Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties

Thin Solid Films ◽

10.1016/s0040-6090(97)00420-3 ◽

1997 ◽

Vol 308-309 ◽

pp. 239-244 ◽

Cited By ~ 46

Author(s):

M Kohzaki ◽

A Matsumuro ◽

T Hayashi ◽

M Muramatsu ◽

K Yamaguchi

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Carbon Nitride ◽

Ion Beam ◽

Ion Beam Assisted Deposition

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Effect of Microstructure on Microhardness of AlN Thin Films

MRS Proceedings ◽

10.1557/proc-695-l5.3.1 ◽

2001 ◽

Vol 695 ◽

Author(s):

Shuichi Miyabe ◽

Masami Aono ◽

Nobuaki Kitazawa ◽

Yoshihisa Watanabe

Keyword(s):

Thin Films ◽

Film Thickness ◽

Beam Energy ◽

Ion Beam ◽

Columnar Structure ◽

Granular Structure ◽

Nano Indentation ◽

Ion Beam Assisted Deposition ◽

Film Microstructure ◽

Nitrogen Ion

ABSTRACTAluminum nitride (AlN) thin films with columnar and granular structures were prepared by ion-beam assisted deposition method by changing nitrogen ion beam energy, and the effects of the film microstructure and film thickness on their microhardness were studied by using a nano-indentation system with the maximum force of 3 mN. For the columnar structure film of 600 nm in thickness, the microhardness is found to be approximately 24 GPa when the normalized penetration depth to the film thickness is about 0.1. For the granular structure film of 700 nm in thickness, the microhardness is found to be approximately 14 GPa. These results reveal that the microhardness of the AlN films strongly depends on the film microstructure, which can be controlled by regulating the nitrogen ion beam energy.

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Mechanical Properties of Nanocomposite TiN/Si3N4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)

Journal of Tribology ◽

10.1115/1.1537749 ◽

2003 ◽

Vol 125 (2) ◽

pp. 445-447 ◽

Cited By ~ 8

Author(s):

Chenhui Zhang ◽

Jianbin Luo ◽

Wenzhi Li ◽

Darong Chen

Keyword(s):

Mechanical Properties ◽

Grain Size ◽

Ion Beam ◽

Nanocomposite Coatings ◽

Ion Beam Assisted Deposition ◽

Aisi 52100 ◽

Aisi 52100 Steel ◽

Nanoindentation Hardness ◽

Si3n4 Film ◽

Amorphous Si3n4

Nanocomposite coatings of TiN/Si3N4 have been prepared by ion beam assisted deposition (IBAD): simultaneous sputtering of Ti and Si targets and film bombardment by N2+ ions at 1000 eV. The Si/Ti ratio in the film varies from 0 to 0.9. The coatings are composed of amorphous Si3N4 and TiN nanocrystals with grain size of several nanometers. Such nanocomposites exhibit improved mechanical properties in comparison with TiN or Si3N4 deposited under the same conditions. The nanoindentation hardness of TiN/Si3N4 film at the Si/Ti ratio of 0.3 reaches a maximum of 42 GPa, compared with 22 GPa for TiN and 18 GPa for Si3N4. The wear resistance of AISI 52100 steel coated with these nanocomposite coatings is increased about three times.

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