Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques
2006 ◽
Vol 352
(9-20)
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pp. 1361-1366
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2013 ◽
Vol 25
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pp. 41-47
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2007 ◽
Vol 46
(11-12)
◽
pp. 543-549
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2015 ◽
Vol 339
◽
pp. 102-108
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2013 ◽
Vol 143
(1)
◽
pp. 223-227
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2010 ◽
Vol 49
(5)
◽
pp. 05FE02
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Keyword(s):
2011 ◽
Vol 88
(8)
◽
pp. 2338-2341
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