Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition
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2010 ◽
Vol 7
(6)
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pp. 1550-1552
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2018 ◽
Vol 6
(24)
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pp. 6471-6482
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2013 ◽
Vol 31
(1)
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pp. 01A132
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2017 ◽
Vol 122
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pp. 377-385
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2007 ◽
Vol 7
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pp. 3758-3764
2008 ◽
Vol 155
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pp. H267
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