TCAD simulation of hot-carrier stress degradation in split-gate n-channel STI-LDMOS transistors

2020 ◽  
Vol 109 ◽  
pp. 113643
Author(s):  
Federico Giuliano ◽  
Paolo Magnone ◽  
Simone Pistollato ◽  
Andrea Natale Tallarico ◽  
Susanna Reggiani ◽  
...  
2019 ◽  
Vol 40 (4) ◽  
pp. 498-501
Author(s):  
Kai-Chun Chang ◽  
Jih-Chien Liao ◽  
Ting-Chang Chang ◽  
Chien-Hung Yeh ◽  
Chien-Yu Lin ◽  
...  

Author(s):  
H. Enichlmair ◽  
J. M. Park ◽  
S. Carniello ◽  
B. Loeffler ◽  
R. Minixhofer ◽  
...  

2020 ◽  
Vol 41 (1) ◽  
pp. 54-57 ◽  
Author(s):  
Hong-Chih Chen ◽  
Hong-Yi Tu ◽  
Hui-Chun Huang ◽  
Wei-Chih Lai ◽  
Ting-Chang Chang ◽  
...  

Author(s):  
Susanna Reggiani ◽  
Elena Gnani ◽  
Antonio Gnudi ◽  
Giorgio Baccarani ◽  
Stefano Poli ◽  
...  

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-779-C4-782 ◽  
Author(s):  
C. BERGONZONI ◽  
R. BENECCHI ◽  
P. CAPRARA

2006 ◽  
Vol 913 ◽  
Author(s):  
Young Way Teh ◽  
John Sudijono ◽  
Alok Jain ◽  
Shankar Venkataraman ◽  
Sunder Thirupapuliyur ◽  
...  

AbstractThis work focuses on the development and physical characteristics of a novel dielectric film for a pre-metal dielectric (PMD) application which induces a significant degree of tensile stress in the channel of a sub-65nm node CMOS structure. The film can be deposited at low temperatures to meet the requirements of NiSi integration while maintaining void-free gap fill and superior film quality such as moisture content and uniformity. A manufacturable and highly reliable oxide film has been demonstrated through both TCAD simulation and real device data, showing ~6% NMOS Ion-Ioff improvement; no Ion-Ioff improvement or degradation on PMOS. A new concept has been proposed to explain the PMD strain effect on device performance improvement. Improvement in Hot Carrier immunity is observed compared to similar existing technologies using high density plasma (HDP) deposition techniques.


2017 ◽  
Vol 74 ◽  
pp. 74-80 ◽  
Author(s):  
Lihua Dai ◽  
Xiaonian Liu ◽  
Mengying Zhang ◽  
Leqing Zhang ◽  
Zhiyuan Hu ◽  
...  

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