Mechanical properties of tungsten following rhenium ion and helium plasma exposure

AbstractPlasma processing is an essential part for the fabrication of GaAs ICs.It was found that the exposure of sulfur doped n-type GaAs layers to a plasma of helium, oxygen, or nitrogen changed their electrical characteristics without introducing crystalline damage, as observed by electron diffraction measurments or etching.Exposure to a plasma depletes the surface carrier concentration but the mobility remains unchanged.Compared to O2 and N2 the helium plasma has the largest effect on the GaAs surface.Exposure of S-doped GaAs layers to a He plasma at 350°C produces two new deep levels at 840-nm and in the region between 863 and 872-nm.These levels were not observed for a He plasma exposure at room temperature or for O2 plasma exposure at 350°C.

Download Full-text

In situ reflectivity of tungsten mirrors under helium plasma exposure

Journal of Nuclear Materials ◽

10.1016/j.jnucmat.2009.01.276 ◽

2009 ◽

Vol 390-391 ◽

pp. 1149-1152 ◽

Cited By ~ 48

Author(s):

W. Sakaguchi ◽

S. Kajita ◽

N. Ohno ◽

M. Takagi

Keyword(s):

Helium Plasma ◽

Plasma Exposure

Download Full-text

Effect of high flux plasma exposure on the micro-structural and -mechanical properties of ITER specification tungsten

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2016.10.041 ◽

2017 ◽

Vol 393 ◽

pp. 155-159 ◽

Cited By ~ 14

Author(s):

A. Dubinko ◽

D. Terentyev ◽

A. Bakaeva ◽

T. Pardoen ◽

M. Zibrov ◽

...

Keyword(s):

Mechanical Properties ◽

High Flux ◽

Plasma Exposure

Download Full-text

Plasma exposure inducing crystallization of indium oxide film with improved electrical and mechanical properties at room temperature

Journal of Materials Science ◽

10.1007/s10853-014-8314-0 ◽

2014 ◽

Vol 49 (17) ◽

pp. 5955-5960 ◽

Cited By ~ 4

Author(s):

Lei Yang ◽

Jiaqi Zhu ◽

Jie Bai ◽

Yuankun Zhu ◽

Bing Dai ◽

...

Keyword(s):

Mechanical Properties ◽

Oxide Film ◽

Indium Oxide ◽

Room Temperature ◽

Plasma Exposure ◽

Indium Oxide Film

Download Full-text

Local Mechanical Properties of Au Thin Films on Polyethylene

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.586.87 ◽

2013 ◽

Vol 586 ◽

pp. 87-90

Author(s):

Olga Bláhová ◽

Petra Bublíková ◽

Petr Slepička ◽

Václav Švorčík

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Surface Modification ◽

Surface Morphology ◽

Plasma Exposure ◽

Au Thin Films

Mechanical properties and surface morphology of metallized and grafted PE samples were studied upon their surface modification (plasma exposure and grafting) and subsequent metallization (Au sputtering).

Download Full-text