Six-DOF micro-manipulator based on compliant parallel mechanism with integrated force sensor

Abstract This paper presents the design and analysis of a six-component Force/Torque (F/T) sensor whose design is based on the mechanism of the Compliant Parallel Mechanism (CPM). The force sensor is used to measure forces along the x-, y-, and z-axis (Fx, Fy and Fz) and moments about the x-, y-, and z-axis (Mx, My and Mz) simultaneously and to provide passive compliance during parts handling and assembly. Particularly, the structural design, the details of the measuring principle and the kinematics are presented. Afterwards, based on the Design of Experiments (DOE) approach provided by the software ANSYS®, a Finite Element Analysis (FEA) is performed. This analysis is performed with the objective of achieving both high sensitivity and isotropy of the sensor. The results of FEA show that the proposed sensor possesses high performance and robustness.

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Development of a Compliant-Mechanism-Based Compact Three-Axis Force Sensor for High-Precision Manufacturing

Volume 9: 2015 ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications ◽

10.1115/detc2015-46166 ◽

2015 ◽

Author(s):

Guangbo Hao ◽

Marc Murphy ◽

Xichun Luo

Keyword(s):

High Precision ◽

Parallel Mechanism ◽

Compliant Mechanism ◽

Experimental Testing ◽

Force Sensor ◽

Force Sensing ◽

Linear Matrix ◽

Precision Manufacturing ◽

Decoupling Method ◽

Compliant Parallel Mechanism

This paper develops a light-weight compact three-axis force senor for high-precision manufacturing application. This sensor uses a cubic three-axial translational compliant parallel mechanism to undergo the loading on its end-effector thereby producing voltages through strain gauges on the deformed beams. The cubic compliant parallel mechanism and sensor system are described at first. Force sensing theoretical analysis is then presented followed by the initial experimental testing and analysis. A linear matrix based multi-axis loading decoupling method is also proposed so that the sensed force can maximally reflect the actual applied force in each axis. The work in this paper is expected to lay a foundation for further investigation into the online force sensing in the high-precision machine tool.

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Micromanipulator with integrated force sensor based on compliant parallel mechanism

2010 IEEE International Conference on Robotics and Biomimetics ◽

10.1109/robio.2010.5723413 ◽

2010 ◽

Cited By ~ 5

Author(s):

Qiaokang Liang ◽

Dan Zhang ◽

Quanjun Song ◽

Yunjian Ge

Keyword(s):

Parallel Mechanism ◽

Force Sensor ◽

Compliant Parallel Mechanism

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Design and DOF Analysis of a Novel Compliant Parallel Mechanism for Large Load

Sensors ◽

10.3390/s19040828 ◽

2019 ◽

Vol 19 (4) ◽

pp. 828 ◽

Cited By ~ 4

Author(s):

Xiaochuan Wu ◽

Yi Lu ◽

Xuechao Duan ◽

Dan Zhang ◽

Wenyao Deng

Keyword(s):

Finite Element ◽

Parallel Mechanism ◽

Screw Theory ◽

Load Capacity ◽

Spherical Joint ◽

Analysis Model ◽

Compliance Matrix ◽

Large Load ◽

Compliant Parallel Mechanism ◽

Six Dof

The degree of freedom (DOF) and motion characteristics of a kind of compliant spherical joint were analyzed based on the screw theory, and a new design scheme for force-inversion of the compliant spherical joint was proposed in this paper. A novel type of six DOF compliant parallel mechanism (CPM) was designed based on this scheme to provide a large load capacity and achieve micrometer-level positioning accuracy. The compliance matrix of the new type of CPM was obtained through matrix transformation and was then decomposed into its generalized eigenvalues. Then, the DOF of the mechanism was numerically analyzed based on the symbolic formulation. The finite element analysis model of the compliant parallel mechanism was established. The static load analysis was used to verify the large load capacity of the mobile platform. By comparing the deformation obtained by the compliance matrix numerical method with the deformation obtained by the finite element method, the correctness of the compliance matrix and the number of the DOF of the CPM was verified.

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A Decoupled 6-DOF Compliant Parallel Mechanism with Optimized Dynamic Characteristics Using Cellular Structure

Machines ◽

10.3390/machines9010005 ◽

2021 ◽

Vol 9 (1) ◽

pp. 5

Author(s):

Minh Tuan Pham ◽

Song Huat Yeo ◽

Tat Joo Teo ◽

Pan Wang ◽

Mui Ling Sharon Nai

Keyword(s):

Parallel Mechanism ◽

Cellular Structure ◽

Degrees Of Freedom ◽

Dynamic Properties ◽

Dynamic Performance ◽

Three Dimensional ◽

Optimization Method ◽

End Effector ◽

Compliant Parallel Mechanism ◽

Six Dof

This paper presents a novel six degrees-of-freedom (DOF) compliant parallel mechanism (CPM) with decoupled output motions, large workspace of ≥6 mm for translations and ≥12° for rotations, optimized stiffness, and dynamic properties. The working range and the motion decoupling capability of the six-DOF CPM are experimentally verified, and the mechanical properties are shown to be predictable. The proposed CPM is synthesized by applying the beam-based structural optimization method together with the criteria for achieving motion decoupling capability. In order to improve the dynamic behaviors for the CPM, cellular structure is used to design its end effector. The obtained results show that the dynamic performance of the CPM with cellular end effector is significantly enhanced with the increase of 33% of the first resonance frequency as compared to the initial design. Performances of the three-dimensional (3D)-printed prototype are experimentally evaluated in terms of mechanical characteristics and decoupled motions. The obtained results show that the actual stiffness and dynamic properties agree with the predictions with the highest deviation of ~10.5%. The motion decoupling capability of the CPM is also demonstrated since almost input energy (>99.5%) generates the desired output motions while the energy causes parasitic motions is only minor (<0.5%).

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Experimental Validation of the Kinematics of a 3PRS Compliant Mechanism for Micromilling

Volume 5A: 39th Mechanisms and Robotics Conference ◽

10.1115/detc2015-47449 ◽

2015 ◽

Author(s):

Antonio Ruiz ◽

Francisco Campa Gomez ◽

Constantino Roldan-Paraponiaris ◽

Oscar Altuzarra

Keyword(s):

Parallel Mechanism ◽

Degrees Of Freedom ◽

Experimental Validation ◽

Compliant Mechanism ◽

Motion Controller ◽

End Effector ◽

Compliant Joints ◽

Hybrid Manipulator ◽

Compliant Parallel Mechanism ◽

Actuated Joints

The present work deals with the development of a hybrid manipulator of 5 degrees of freedom for milling moulds for microlenses. The manipulator is based on a XY stage under a 3PRS compliant parallel mechanism. The mechanism takes advantage of the compliant joints to achieve higher repetitiveness, smoother motion and a higher bandwidth, due to the high precision demanded from the process, under 0.1 micrometers. This work is focused on the kinematics of the compliant stage of the hybrid manipulator. First, an analysis of the workspace required for the milling of a single mould has been performed, calculating the displacements required in X, Y, Z axis as well as two relative rotations between the tool and the workpiece from a programmed toolpath. Then, the 3PRS compliant parallel mechanism has been designed using FEM with the objective of being stiff enough to support the cutting forces from the micromilling, but flexible enough in the revolution and spherical compliant joints to provide the displacements needed. Finally, a prototype of the 3PRS compliant mechanism has been built, implementing a motion controller to perform translations in Z direction and two rotations. The resulting displacements in the end effector and the actuated joints have been measured and compared with the FEM calculations and with the rigid body kinematics of the 3PRS.

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Modal Simulation and Testing of a Micro-Manipulator

Journal of Dynamic Systems Measurement and Control ◽

10.1115/1.1978907 ◽

2004 ◽

Vol 127 (3) ◽

pp. 515-519 ◽

Cited By ~ 4

Author(s):

Yongjun Lai ◽

Marek Kujath ◽

Ted Hubbard

Keyword(s):

Numerical Simulations ◽

Degrees Of Freedom ◽

Compliant Mechanism ◽

Dynamic Properties ◽

Experimental Results ◽

Mass Model ◽

Thermal Actuators ◽

Micro Manipulator ◽

Six Dof

A micro-machined manipulator with three kinematic degrees-of-freedom (DOF): x, y, and φ is presented. The manipulator is driven by three thermal actuators. A six DOF discrete spring-mass model of the compliant mechanism is developed which manifests the dynamic properties of the device. Numerical simulations are compared with experimental results.

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