Toward energy-efficient physical vapor deposition: Routes for replacing substrate heating during magnetron sputter deposition by employing metal ion irradiation
1988 ◽
Vol 6
(3)
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pp. 1694-1695
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1991 ◽
Vol 137-138
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pp. 783-786
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Keyword(s):
2001 ◽
Vol 394
(1-2)
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pp. 255-262
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Keyword(s):
1996 ◽
Vol 80
(1-2)
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pp. 190-194
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Keyword(s):
2013 ◽
Vol 39
(5)
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pp. 5175-5184
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1993 ◽
Vol 60
(1-3)
◽
pp. 480-483
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Keyword(s):