Improved critical temperature of superconducting plasma-enhanced atomic layer deposition of niobium nitride thin films by thermal annealing
2020 ◽
Vol 709
◽
pp. 138232
Liang Tian
◽
Ivane Bottala-Gambetta
◽
Victor Marchetto
◽
Manoël Jacquemin
◽
Alexandre Crisci
◽
...
2012 ◽
Vol 26
(2)
◽
pp. 025008
◽
Mario Ziegler
◽
Ludwig Fritzsch
◽
Julia Day
◽
Sven Linzen
◽
Solveig Anders
◽
...
2020 ◽
Vol 217
(8)
◽
pp. 1900909
◽
Marion Scarafagio
◽
Alexandre Tallaire
◽
Marie-Hélène Chavanne
◽
Michel Cassir
◽
Armelle Ringuedé
◽
...
Zi-Yi Wang
◽
Rong-Jun Zhang
◽
Hong-Liang Lu
◽
Xin Chen
◽
Yan Sun
◽
...
2011 ◽
Vol 258
(1)
◽
pp. 604-607
◽
A. Lale
◽
M. Joly
◽
S. Mekkaoui
◽
X. Joly
◽
E. Scheid
◽
...
2016 ◽
Vol 9
(8)
◽
pp. 695
◽
Jingjin Wu
◽
Yinchao Zhao
◽
Ce Zhao
◽
Li Yang
◽
Qifeng Lu
◽
...
2014 ◽
Vol 103
◽
pp. 1-4
◽
Yuan Zhang
◽
Hong-Liang Lu
◽
Yang Geng
◽
Qing-Qing Sun
◽
Shi-Jin Ding
◽
...
2020 ◽
Vol 700
◽
pp. 137922
Tommi Tynell
◽
Kevin Geishendorf
◽
Sabrina Piontek
◽
Tim Komossa
◽
Stephan Schulz
◽
...
Zi-Yi Wang
◽
Rong-Jun Zhang
◽
Hong-Liang Lu
◽
Xin Chen
◽
Yan Sun
◽
...
2021 ◽
Vol 3
(2)
◽
pp. 999-1005
Hyeok Jae Lee
◽
Jin Ha Hwang
◽
Ji-Yong Park
◽
Sang Woon Lee