Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

2012 ◽  
Vol 26 (2) ◽  
pp. 025008 ◽  
Author(s):  
Mario Ziegler ◽  
Ludwig Fritzsch ◽  
Julia Day ◽  
Sven Linzen ◽  
Solveig Anders ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Niobium Nitride ◽  
Layer Deposition ◽  
Metal Organic

Metal–Organic Framework Thin Films as Platforms for Atomic Layer Deposition of Cobalt Ions To Enable Electrocatalytic Water Oxidation

2015 ◽  
Vol 7 (51) ◽  
pp. 28223-28230 ◽  
Author(s):  
Chung-Wei Kung ◽  
Joseph E. Mondloch ◽  
Timothy C. Wang ◽  
Wojciech Bury ◽  
William Hoffeditz ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Water Oxidation ◽  
Metal Organic Framework ◽  
Atomic Layer ◽  
Cobalt Ions ◽  
Layer Deposition ◽  
Metal Organic ◽  
Organic Framework

scholarly journals Combining nanoparticles grown by ALD and MOFs for gas separation and catalysis applications

2020 ◽  
Vol 92 (2) ◽  
pp. 213-222 ◽  
Author(s):  
Matthieu Weber ◽  
Mikhael Bechelany
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gas Separation ◽  
Vapor Phase ◽  
Metallic Nanoparticles ◽  
Metal Organic Frameworks ◽  
Atomic Layer ◽  
Chemical Processes ◽  
Layer Deposition ◽  
Metal Organic

AbstractSupported metallic nanoparticles (NPs) are essential for many important chemical processes. In order to implement precisely tuned NPs in miniaturized devices by compatible processes, novel nanoengineering routes must be explored. Atomic layer deposition (ALD), a scalable vapor phase technology typically used for the deposition of thin films, represents a promising new route for the synthesis of supported metallic NPs. Metal–organic frameworks (MOFs) are a new exciting class of crystalline porous materials that have attracted much attention in the recent years. Since the size of their pores can be precisely adjusted, these nanomaterials permit highly selective separation and catalytic processes. The combination of NPs and MOF is an emerging area opening numbers of applications, which still faces considerable challenges, and new routes need to be explored for the synthesis of these NPs/MOF nanocomposites. The aim of this paper is double: first, it aims to briefly present the ALD route and its use for the synthesis of metallic NPs. Second, the combination of ALD-grown NPs and MOFs has been explored for the synthesis of Pd NPs/MOF ZIF-8, and several selected examples were ALD-grown NPs and MOFs have been combined and applied gas separation and catalysis will be presented.

scholarly journals Improved critical temperature of superconducting plasma-enhanced atomic layer deposition of niobium nitride thin films by thermal annealing

2020 ◽  
Vol 709 ◽  
pp. 138232
Author(s):  
Liang Tian ◽  
Ivane Bottala-Gambetta ◽  
Victor Marchetto ◽  
Manoël Jacquemin ◽  
Alexandre Crisci ◽  
...  
Keyword(s):  
Thin Films ◽  
Critical Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Annealing ◽  
Atomic Layer ◽  
Niobium Nitride ◽  
Layer Deposition

scholarly journals On the Use of MOFs and ALD Layers as Nanomembranes for the Enhancement of Gas Sensors Selectivity

Nanomaterials ◽  
2019 ◽  
Vol 9 (11) ◽  
pp. 1552 ◽  
Author(s):  
Weber ◽  
Graniel ◽  
Balme ◽  
Miele ◽  
Bechelany
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Gas Sensing ◽  
Metal Organic Frameworks ◽  
Atomic Layer ◽  
Operational Performance ◽  
Layer Deposition ◽  
Metal Organic ◽  
Further Development ◽  
Different Gases

Improving the selectivity of gas sensors is crucial for their further development. One effective route to enhance this key property of sensors is the use of selective nanomembrane materials. This work aims to present how metal-organic frameworks (MOFs) and thin films prepared by atomic layer deposition (ALD) can be applied as nanomembranes to separate different gases, and hence improve the selectivity of gas sensing devices. First, the fundamentals of the mechanisms and configuration of gas sensors will be given. A selected list of studies will then be presented to illustrate how MOFs and ALD materials can be implemented as nanomembranes and how they can be implemented to improve the operational performance of gas sensing devices. This review comprehensively shows the benefits of these novel selective nanomaterials and opens prospects for the sensing community.

Depositing High-Performance Conductive Thin Films by Using Atomic Layer Deposition

2015 ◽  
Vol 764-765 ◽  
pp. 138-142 ◽  
Author(s):  
Fa Ta Tsai ◽  
Hsi Ting Hou ◽  
Ching Kong Chao ◽  
Rwei Ching Chang
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Atomic Layer ◽  
Electric Properties ◽  
X Ray Diffraction ◽  
Layer Deposition ◽  
Azo Thin Film ◽  
Aluminum Doped Zinc Oxide ◽  
Conductive Thin Films

This work characterizes the mechanical and opto-electric properties of Aluminum-doped zinc oxide (AZO) thin films deposited by atomic layer deposition (ALD), where various depositing temperature, 100, 125, 150, 175, and 200 °C are considered. The transmittance, microstructure, electric resistivity, adhesion, hardness, and Young’s modulus of the deposited thin films are tested by using spectrophotometer, X-ray diffraction, Hall effect analyzer, micro scratch, and nanoindentation, respectively. The results show that the AZO thin film deposited at 200 °C behaves the best electric properties, where its resistance, Carrier Concentration and mobility reach 4.3×10-4 Ωcm, 2.4×1020 cm-3, and 60.4 cm2V-1s-1, respectively. Furthermore, microstructure of the AZO films deposited by ALD is much better than those deposited by sputtering.

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