Large area electron-beam-excited plasma of meter size for industrial applications

Vacuum ◽  
2002 ◽  
Vol 66 (3-4) ◽  
pp. 203-207
Author(s):  
H Homyara ◽  
S Ahmad ◽  
S Ikezawa ◽  
K Baba ◽  
T Yoshioka ◽  
...  
1997 ◽  
Vol 68 (6) ◽  
pp. 2357-2366 ◽  
Author(s):  
J. D. Sethian ◽  
S. P. Obenschain ◽  
K. A. Gerber ◽  
C. J. Pawley ◽  
V. Serlin ◽  
...  

2015 ◽  
Vol 21 (6) ◽  
pp. 1639-1643 ◽  
Author(s):  
Shih-En Lai ◽  
Ying-Jhan Hong ◽  
Yu-Ting Chen ◽  
Yu-Ting Kang ◽  
Pin Chang ◽  
...  

AbstractWe demonstrate direct electron beam writing of a nano-scale Cu pattern on a surface with a thin aqueous layer of CuSO4 solution. Electron beams are highly maneuverable down to nano-scales. Aqueous solutions facilitate a plentiful metal ion supply for practical industrial applications, which may require continued reliable writing of sophisticated patterns. A thin aqueous layer on a surface helps to confine the writing on the surface. For this demonstration, liquid sample holder (K-kit) for transmission electron microscope (TEM) was employed to form a sealed space in a TEM. The aqueous CuSO4 solution inside the sample holder was allowed to partially dry until a uniform thin layer was left on the surface. The electron beam thus reduced Cu ions in the solution to form the desired patterns. Furthermore, the influence of e-beam exposure time and CuSO4(aq) concentration on the Cu reduction was studied in this work. Two growth stages of Cu were shown in the plot of Cu thickness versus e-beam exposure time. The measured Cu reduction rate was found to be proportional to the CuSO4(aq) concentration.


2014 ◽  
Vol 311 ◽  
pp. 534-540 ◽  
Author(s):  
J.C. Walker ◽  
J.W. Murray ◽  
M. Nie ◽  
R.B. Cook ◽  
A.T. Clare

1995 ◽  
Vol 38 (12) ◽  
pp. 1279-1282 ◽  
Author(s):  
N. A. Ratakhin ◽  
V. F. Fedushchak ◽  
A. N. Shepelev

AIP Advances ◽  
2019 ◽  
Vol 9 (7) ◽  
pp. 075104 ◽  
Author(s):  
Sung Tae Yoo ◽  
Byeongchan So ◽  
Hye In Lee ◽  
Okhyun Nam ◽  
Kyu Chang Park

Vacuum ◽  
1990 ◽  
Vol 41 (4-6) ◽  
pp. 796-799 ◽  
Author(s):  
Y.C Du ◽  
H Wang ◽  
B.Z Li ◽  
D.C Sun ◽  
Z.Q Yu ◽  
...  

2002 ◽  
Vol 715 ◽  
Author(s):  
Atsushi Masuda ◽  
Akira Izumi ◽  
Hironobu Umemoto ◽  
Hideki Matsumura

AbstractRapid progresses are achieved in catalytic CVD (Cat-CVD), often called hot-wire CVD, in the past 3-years NEDO national project in Japan. Cat-CVD technology presents many advantages in thin-film formation processes; high-efficiency of gas use, large-area deposition, no ion bombardment and low-temperature deposition even below 200°C. All of the elemental techniques for the industrially applicable Cat-CVD apparatuses, such as the suppression of the metal contamination, the precise control of the substrate temperature, the life extension of the catalyzer, 1-m size uniform deposition and the chamber cleaning, have been completely developed. Sophisticatedly designed substrate holder with electrostatic chuck and showerhead equipped with catalyzers are both key technologies for these achievements. High reproducibility for film properties is also obtained by controlling the reaction between high-density radicals and chamber walls. Prototype mass-production apparatus for SiNx passivation films in GaAs devices has been already developed and this will be probably the first application of Cat-CVD in industry. These recent movements appear to promise the drastic revolution in semiconductor and flat-panel display industries by introducing Cat-CVD in very near future.


2019 ◽  
Vol 68 (6) ◽  
pp. 369-389 ◽  
Author(s):  
Shakhawat Chowdhury ◽  
Imran Rahman Chowdhury ◽  
Fayzul Kabir ◽  
Mohammad Abu Jafar Mazumder ◽  
Md. Hasan Zahir ◽  
...  

Abstract The alginate-based adsorption technologies have emerged as potential methods for arsenic removal from drinking water. The adsorbents (iron oxide, hydroxide, nano zero valent iron (nZVI), industrial waste, minerals, magnetite, goethite, zirconium oxide, etc.) are impregnated into alginate beads to produce the media. The biocompatibility, rough surface with large area, and amorphous and high water permeable bead structure improve arsenic adsorption efficiency while the regeneration process is simpler than the conventional adsorbents. In recent years, studies have reported laboratory-scale applications of alginate beads, encapsulated and impregnated with adsorbents, for arsenic removal from drinking water. The arsenic removal efficiencies were reported to be over 95% with a wide range of concentrations (10–1,000 parts per billion) and pH (3.0–7.5). However, commercial- and/or mass-scale applications have not been reported yet, due possibly to overall cost, complexity, reusability, and arsenic waste-laden sludge management. In this paper, research achievement on arsenic removal using alginate-based adsorbents has been reviewed. The review was performed in context to alginate bead development, adsorbent encapsulation and impregnation, application, performance, and regeneration. The advantages and limitations of the methods were analyzed and the scopes of future research were identified for mass scale domestic and industrial applications.


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