Silicon micromachining processes combined with thick-film printed lead zirconate titanate actuators for microelectromechanical systems

1999 ◽  
Vol 40 (4) ◽  
pp. 187-191 ◽  
Author(s):  
S.P Beeby ◽  
A Blackburn ◽  
N.M White
Keyword(s):  
Thick Film ◽  
Lead Zirconate Titanate ◽  
Microelectromechanical Systems ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Silicon Micromachining

Wet-Etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications

2000 ◽  
Vol 657 ◽  
Author(s):  
L.-P. Wang ◽  
R. Wolf ◽  
Q. Zhou ◽  
S. Trolier-McKinstry ◽  
R. J. Davis
Keyword(s):  
Lead Zirconate Titanate ◽  
Electromechanical Coupling ◽  
Microelectromechanical Systems ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Metal Fluoride ◽  
Zirconate Titanate ◽  
Pzt Films ◽  
High Etch Rate ◽  
Wet Etch

ABSTRACTLead zirconate titanate (PZT) films are very attractive for microelectromechanical systems (MEMS) applications because of their high piezoelectric coefficients and good electromechanical coupling. In this work, wet-etch patterning of sol-gel PZT films for MEMS applications, typically with film thicknesses ranging from 2 to 10 microns, was studied. A two- step wet-etch process was developed. In the first step, 10:1 buffered HF is used to remove the majority of the film at room temperature. Then a solution of 2HCl:H2O at 45°C is used to remove metal-fluoride residues remaining from the first step. This enabled successful patterning of PZT films up to 8 microns thick. A high etch rate (0.13μm/min), high selectivity with respect to photoresist, and limited undercutting (2:1 lateral:thickness) were obtained. The processed PZT films have a relative permittivity of 1000, dielectric loss of 1.6%, remanent polarization (Pr) of 24μC/cm2, and coercive field (Ec) of 42.1kV/cm, all similar to those of unpatterned films of the same thickness.

Mechanical energy harvesting using polyurethane/lead zirconate titanate composites

2017 ◽  
Vol 52 (9) ◽  
pp. 1171-1182 ◽  
Author(s):  
Abdelkader Rjafallah ◽  
Abdelowahed Hajjaji ◽  
Fouad Belhora ◽  
Daniel Guyomar ◽  
Laurence Seveyrat ◽  
...  
Keyword(s):  
Energy Harvesting ◽  
Lead Zirconate Titanate ◽  
Microelectromechanical Systems ◽  
Volume Fraction ◽  
Mechanical Energy ◽  
Mechanical Strain ◽  
Lead Zirconate ◽  
Inorganic Materials ◽  
Zirconate Titanate ◽  
Electromechanical Transduction

The microelectromechanical systems invade gradually the market with applications in many sectors of activity. Developing these micro-systems allows deploying wireless sensor networks that are useful to collect, process and transmit information from their environments without human intervention. In order to keep these micro-devices energetically autonomous without using batteries because they have a limited lifespan, an energy harvesting from ambient vibrations using electrostrictive polymers can be used. These polymers present best features against inorganic materials, as flexibility and low cost. The aims of this paper are manifold. First of all, we made elaboration of the polyurethane/lead zirconate titanate films of 100 µm thickness using a lead zirconate titanate–volume fraction of [Formula: see text]%. Therefore, we did an observation of the lead zirconate titanate grains dispersion and the electrical characterization of the polyurethane–50 vol% lead zirconate titanate composites. Finally, a detailed study of the electromechanical transduction, for the polyurethane–50 vol% lead zirconate titanate unpolarized and polarized composites sustained to the sinusoidal mechanical strain with amplitude of 1.5% and at very low frequencies ( f = 2 [Hz] and f = 4 [Hz]) and static electric field ( Edc = 10 [ V/µm]) or without it ( Edc = 0 [ V/µm]) has been presented.

Lead Zirconate Titanate Thick Film Prepared by Electrophoretic Deposition from Oxide Mixture

2002 ◽  
Vol 17 (5) ◽  
pp. 933-935 ◽  
Author(s):  
R. F. Zhang ◽  
J. Ma ◽  
L. B. Kong
Keyword(s):  
Thick Film ◽  
Lead Zirconate Titanate ◽  
Electrophoretic Deposition ◽  
Single Phase ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
Oxide Mixture ◽  
Zirconate Titanate ◽  
Ceramic Films ◽  
Pzt Thick Film

Lead zirconate titanate (PbZr0.52Ti0.48O3; PZT) thick film with a thickness of 70 µm was prepared by the electrophoretic deposition method from a raw oxide mixture of PbO, ZrO2, and TiO2. X-ray diffraction and scanning electron microscopy were used to characterize the sintered PZT thick film. Single phase PZT was observed in the films sintered at 900 °C and above. The film sintered at 1000 °C for 30 min exhibited a dielectric constant of 1050 with a dielectric loss of about 0.05 measured at 1 kHz, a maximum polarization of 29 µC/cm2, a remnant polarization of 19 µC/cm2, and a coercive field of 21 kV/cm. This simple process to form PZT thick films may also be applied to the preparation of other multicomponent ceramics and ceramic films.

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