High Resolution Electron Microscope Using a New 200 kV Electron Gun
Higher accelerating voltage has been required of transmission electron microscopes in various research and application fields. In this report, a new electron gun developed by Hitachi, Ltd. will be described. The aim of this development was to design a compact 200 kV electron microscope offering simplicity and convenience of operation and maintenance and the highest possible performance.Description will be made first on the packaged electron gun. Fig. 1 shows the sectional view of the gun. The accelerating tube is built in the gun housing so as to be free from exterior impact. Unlike the conventional gun housing, this one is made of epoxy resin instead of metal. The inside diameter of the housing is reduced to 170 mm due to the excellent insulation property of epoxy resin. A bushing for high voltage cable is mounted on the housing, making its withstand voltage high in spite of the short contour of the housing (140 mm).