Development of High Resolution Electron Microscope, JEM-100B
The JEM-100B electron microscope has been developed with a view to the possibility of obtaining an ultimate resolving power at a beam accelerating voltage of 100kev. Prom the very nature of the instrument, the stability is fully ensured from a mechanical and electrical point of view. In the electron optical system, since highly excited lenses are utilized, image formation under the lowest aberration condition are ensured. The image forming system is of the 4-stage type which greatly expands the range of application not only in microscopic studies but also in the study of electron diffraction. Furthermore, with a view to simplifying instrument operation, various problems have been solved this enabling the instrument to be fully automated. The JEM-100B exhibits the following features.Objective Lens: At the present stage of development, fo=1.6mm. However, so as to be able to incorporate a lens (T. Yanaka et al, 1967) possessing an extremely small spherical aberration coefficient in the future, lens excitation has been made sufficiently high (8kA) and the movable aperture control knob and the specimen device have been designed accordingly.