High-Performance Indium Gallium Tin Oxide Transistors with an Al2O3 Gate Insulator Deposited by Atomic Layer Deposition at a Low Temperature of 150 °C: Roles of Hydrogen and Excess Oxygen in the Al2O3 Dielectric Film

2021 ◽  
Author(s):  
Cheol Hee Choi ◽  
Taikyu Kim ◽  
Shigenori Ueda ◽  
Yu-Shien Shiah ◽  
Hideo Hosono ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
High Performance ◽  
Dielectric Film ◽  
Atomic Layer ◽  
Gate Insulator ◽  
Excess Oxygen ◽  
Layer Deposition ◽  
Indium Gallium

Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

2021 ◽  
pp. 160053
Author(s):  
Hyunjae Jang ◽  
Changyong Oh ◽  
Tae Hyun Kim ◽  
Hyeong Wook Kim ◽  
Sang Ik Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Layer Deposition

High-performance flexible Ag nanowire electrode with low-temperature atomic-layer-deposition fabrication of conductive-bridging ZnO film

nano Online ◽  
2016 ◽  
Author(s):  
Ya-Hui Duan ◽  
Yu Duan ◽  
Ping Chen ◽  
Ye Tao ◽  
Yong-Qiang Yang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Film ◽  
Layer Deposition ◽  
Ag Nanowire

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

2019 ◽  
Vol 11 (16) ◽  
pp. 14892-14901 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Seong Ho Han ◽  
Ga-Yeon Lee ◽  
Byung Joon Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Tin Oxide Films

scholarly journals High-performance bilayer flexible resistive random access memory based on low-temperature thermal atomic layer deposition

2013 ◽  
Vol 8 (1) ◽  
pp. 92 ◽  
Author(s):  
Run-Chen Fang ◽  
Qing-Qing Sun ◽  
Peng Zhou ◽  
Wen Yang ◽  
Peng-Fei Wang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Random Access ◽  
Random Access Memory ◽  
Atomic Layer ◽  
Resistive Random Access Memory ◽  
Access Memory ◽  
Layer Deposition

scholarly journals High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

2020 ◽  
Vol 6 (7) ◽  
pp. 2000195 ◽  
Author(s):  
Christopher R. Allemang ◽  
Tae H. Cho ◽  
Orlando Trejo ◽  
Shantam Ravan ◽  
Robin E. Rodríguez ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
High Performance ◽  
Atomic Layer ◽  
Active Layers ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Oxide Tfts

scholarly journals High-Performance High-Loading Lithium-Sulfur Batteries by Low Temperature Atomic Layer Deposition of Aluminum Oxide on Nanophase S Cathodes

2017 ◽  
Vol 4 (17) ◽  
pp. 1700096 ◽  
Author(s):  
Xiangbo Meng ◽  
Yuzi Liu ◽  
Yanqiang Cao ◽  
Yang Ren ◽  
Wenquan Lu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
High Performance ◽  
Atomic Layer ◽  
High Loading ◽  
Layer Deposition ◽  
Lithium Sulfur Batteries ◽  
Lithium Sulfur

Characteristics of SiO2 Film Grown by Atomic Layer Deposition as the Gate Insulator of Low-Temperature Polysilicon Thin-Film Transistors

2007 ◽  
pp. 247-250
Author(s):  
Won Jun Lee ◽  
Min Ho Chun ◽  
Kwang Su Cheong ◽  
Kwang Chol Park ◽  
Chong Ook Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Gate Insulator ◽  
Layer Deposition

Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors

2018 ◽  
Vol 65 (8) ◽  
pp. 3283-3290 ◽  
Author(s):  
Xingwei Ding ◽  
Jun Yang ◽  
Cunping Qin ◽  
Xuyong Yang ◽  
Tao Ding ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Film ◽  
Nitrogen Doped ◽  
Layer Deposition ◽  
Doped Zno
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